Repair of platen motor servo pack (driver) for CMP equipment. The servo back is Yaskawa P/N: SGDB-44ADG. Yaskawa P/N: 1080-01170 or SGMS-50A6AB can be repaired for the platen motor. Possibility of ...
Repair of platen motors and gearboxes for CMP equipment. Yaskawa P/N: 1080-01170 or SGMS-50A6AB for platen motor, Alpha P/N: 3970-01013 or 140-MFI-10-141-000 for gearbox, Stober, Compatible with Ya...
Repair of cross pedestal (harmonic drive) assembly for CMP equipment. Repair service including standard repair or replacement of new harmonic gear. P/N: 0010-26153 (Old: 0010-77141). For AMAT Mirra...
Repair/refurbishment of megatorque motors and drivers/controllers for CMP machine polishing heads. Mainly compatible with NSK products. The motor mainly carries out bearing exchange. Motor P/N: RZ...
Repair/refurbishment/overhaul of rotary unions for CMP equipment polishing heads. Mainly for Dublin products. Supports 3/4/6/8 ports (zones). Back collection, parts exchange, reassembly, testing. ...
Repair of spindle shaft for CMP equipment. Service including standard repair (cleaning + splash guard powder coating + bearing 4 replacement) and new spindle shaft replacement. Compatible with P/N:...
Wafer/wafer/wafer brush roller assembly repair/overhaul for brush tank parts for CMP cleaning equipment. Compatible parts such as genuine P/N: 0021-13858/0010-23807. For CMP cleaning equipment MES...
