Repair/refurbishment of megatorque motors and drivers/controllers for CMP machine polishing heads. Mainly compatible with NSK products. The motor mainly carries out bearing exchange. Motor P/N: RZ...
Repair/refurbishment/overhaul of rotary unions for CMP equipment polishing heads. Mainly for Dublin products. Supports 3/4/6/8 ports (zones). Back collection, parts exchange, reassembly, testing. ...
Repair of spindle shaft for CMP equipment. Service including standard repair (cleaning + splash guard powder coating + bearing 4 replacement) and new spindle shaft replacement. Compatible with P/N:...
Wafer/wafer/wafer brush roller assembly repair/overhaul for brush tank parts for CMP cleaning equipment. Compatible parts such as genuine P/N: 0021-13858/0010-23807. For CMP cleaning equipment MES...
