Online store for electronics-related products

Collection:

Repair/Rebuild/OH

37 products
Price
  • -
Show all Price
Sold Out
ASK
CMP装置用ターンテーブルモーターの修理/オーバーホール。主にベアリングの交換。P/N:C-5172-042-0001/K89EB7341B。EBARA(荏原) EPO用。形状や型番は写真と異なる場合あり(都度要問い合わせ)。
Sold Out
ASK
エッチング(Etching)装置用の静電チャック(ESC/Eチャック)の再生。アルミ(Al)アルマイト(アノダイズ)再生+ESC貼り換え、ESC貼り換えのみの二通りの再生。8インチ(200mm)用。AMAT(Applied Materials)。P/N:0041-34688/0010-10327/0040-99949の互換品。※写真は代表的なものを載せているため、実物と異なる場合があります。
Sold Out
ASK
イオン注入(インプラ/IMP)装置用ホイールスピンアンプの修理。AMAT(Applied Materials) 9500/XR/XR80用。P/N:0090-91124の互換品。アンプ(電源)メーカー:MOTECH。MR71※写真は代表的なものを載せているため、実物と異なる場合があります。
Sold Out
ASK
イオン注入(インプラ/IMP)装置の静電チャック(ESC/ECHUCK)用電源の修理。純正P/N:E19283790、E11287900の互換品。電源メーカー:TREK 681B。AMAT(VARIAN) VIISta810用。
Sold Out
ASK
Repair/overhaul with upgrade of QC Dry Side for cleaning equipment brush tanks. Compatible with P/N: 0010-25970. Performance such as weight reduction, corrosion resistance, and smooth rotation can ...
Sold Out
ASK
Repair/overhaul with upgrade of QC Wet Side for cleaning equipment brush tanks. Compatible with P/N: 0010-25969. Performance such as weight reduction, corrosion resistance, and smooth rotation can ...
Sold Out
ASK
Repair/overhaul with upgrade of QC gearbox for cleaning equipment brush tank. Compatible with P/N: 0010-25969/0021-18493. It is possible to achieve performance such as gear detachment prevention, p...
Sold Out
ASK
Pump I/O Repair Pump I/O Repair. P/N: 2980-091285-11 (Compatible with model number HTE-PP1-A-11 (TAB1500). For TEL ACT8.
Sold Out
ASK
Cleaning and recycling service for aluminum (Al) anodized/alumina (Al2O3)/yttrium/yttrium (Y2O3) parts for etching equipment. Dry ice cleaning allows cleaning without damaging parts. Upper/lower e...
Sold Out
ASK
A recycling service for aluminum (Al) anodized/anodized parts for etching equipment. Upper/lower electrodes, electrodes, top/bottom plates, electrostatic chucks (ESC/E chucks), baffle plates, depo...
Sold Out
ASK
An upgrade that remodels the ion source (ion source) of the ion implantation (implant/IMP) system from the standard Bernas type to the IHC (cathode) type. A long life ion source can be realized. An...
Sold Out
ASK
Repair and overhaul of vacuum gate valves for semiconductor manufacturing equipment. Mainly for VAT, HVA, etc. For sputtering (PVD), CVD, etching, and ion implantation (implantation/IMP) equipment...
Sold Out
ASK
Regeneration of electrostatic chucks (ESC/E chucks) and heaters for sputtering (PVD) and CVD equipment. Compatible with Centura HDP, TXZ/WXZ/CXZ/DXZ, Producer, P5000 (P-5000), ENDURA5500, etc. Pla...
Regular price from ¥100,000
Sale price from ¥100,000
Regular price
Unit price
per 
Calibration service for UV illuminometers and probes made by OAI in the United States. Compatible with Model306/308/311/316/317/356/357/358/359/457/459/656/659, all 380 series. Probes are 365/400/...
Sold Out
ASK
Regeneration of electrostatic chucks (ESC/E chucks) for etching equipment. Compatible with Centura DPS, Super-e, MXP+, TCP/Alliance 9400/9600, Exelan-Hpt, Flex, Kiyo, UNITY, 8500, DRM, SCCM, etc. P...
Sold Out
ASK
PCB board repair for ion implantation (implantation/IMP) equipment. Compatible with General I/O DI board, IHC source controller PCB, etc. Repair on the premise that there are no missing board parts...
Sold Out
ASK
Repair of HV power supply (high voltage power supply) for ion implantation (implantation/IMP) equipment. Power supply: OL8000/104/02 (A1010070), Stack: OL8000/104/01 (A1010080). Also compatible wi...
Sold Out
Regular price ¥800,000
Sale price ¥800,000
Regular price
Unit price
per 
Repair of Kollmorgen motors for CMP equipment polishing heads. The motor mainly carries out bearing exchange. Compatible with Motor P/N: D101A-93-1215-001 or D101B-93-1210-014. For AMAT Reflexion....
Sold Out
ASK
Regeneration of electrostatic chucks (ESC/E chucks) for ion implantation (implantation/IMP) equipment. Reproduction with upgrades that extend durability and lifespan than genuine products. Compati...
Sold Out
ASK
Repair and overhaul (O/H, OH) of vacuum pumps (cryo, turbo, dry, rotary, etc.) for semiconductor manufacturing equipment. For sputtering (PVD), CVD, etching, and ion implantation (IMP). Helix: CT-...
Sold Out
ASK
Repair and cleaning of HYT probes/particle monitors/sensors (sensors) for ion implantation (implantation/IMP) equipment. Laser diodes, beam stops, photodiodes (window photocells) can also be repla...
Sold Out
ASK
Repair of main controller (control) box for coater (coater) developer, upgrade from #2 (hard-to-find floppy disk/FD) to #3.5 (with USB, HDD mirroring system, RAID, master/slave function). For TEL A...
Sold Out
ASK
Repair of FABS robot for CMP equipment. Made by Rorze. After the repair, the robot is checked for operation with a dedicated test machine. The manufacturer model is RR700L150-Z30-010. It is also po...
Sold Out
ASK
Wet robot repair for CMP equipment. Motors, lead screws, ribbon cables, PCBs and vacuum transducers can also be replaced. After repair, robot axis forming and initialization were performed on the M...