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Repair/Rebuild/OH

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CMP装置用スピンドルの修理。標準修理。スピードファム(SPEEDFAM)向け。
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CMP装置用スピンドルの修理。標準修理。スクリーン(SCREEN) MP3000向け。
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CMP装置用ターンテーブルモーターの修理/オーバーホール。主にベアリングの交換。P/N:C-5172-042-0001/K89EB7341B。EBARA(荏原) EPO用。形状や型番は写真と異なる場合あり(都度要問い合わせ)。
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エッチング(Etching)装置用の静電チャック(ESC/Eチャック)の再生。アルミ(Al)アルマイト(アノダイズ)再生+ESC貼り換え、ESC貼り換えのみの二通りの再生。8インチ(200mm)用。AMAT(Applied Materials)。P/N:0041-34688/0010-10327/0040-99949の互換品。※写真は代表的なものを載せているため、実物と異なる場合があります。
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イオン注入(インプラ/IMP)装置用ホイールスピンアンプの修理。AMAT(Applied Materials) 9500/XR/XR80用。P/N:0090-91124の互換品。アンプ(電源)メーカー:MOTECH。MR71※写真は代表的なものを載せているため、実物と異なる場合があります。
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イオン注入(インプラ/IMP)装置の静電チャック(ESC/ECHUCK)用電源の修理。純正P/N:E19283790、E11287900の互換品。電源メーカー:TREK 681B。AMAT(VARIAN) VIISta810用。
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Repair/overhaul with upgrade of QC Dry Side for cleaning equipment brush tanks. Compatible with P/N: 0010-25970. Performance such as weight reduction, corrosion resistance, and smooth rotation can ...
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Repair/overhaul with upgrade of QC Wet Side for cleaning equipment brush tanks. Compatible with P/N: 0010-25969. Performance such as weight reduction, corrosion resistance, and smooth rotation can ...
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Repair/overhaul with upgrade of QC gearbox for cleaning equipment brush tank. Compatible with P/N: 0010-25969/0021-18493. It is possible to achieve performance such as gear detachment prevention, p...
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Pump I/O Repair Pump I/O Repair. P/N: 2980-091285-11 (Compatible with model number HTE-PP1-A-11 (TAB1500). For TEL ACT8.
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Cleaning and recycling service for aluminum (Al) anodized/alumina (Al2O3)/yttrium/yttrium (Y2O3) parts for etching equipment. Dry ice cleaning allows cleaning without damaging parts. Upper/lower e...
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A recycling service for aluminum (Al) anodized/anodized parts for etching equipment. Upper/lower electrodes, electrodes, top/bottom plates, electrostatic chucks (ESC/E chucks), baffle plates, depo...
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An upgrade that remodels the ion source (ion source) of the ion implantation (implant/IMP) system from the standard Bernas type to the IHC (cathode) type. A long life ion source can be realized. An...
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Repair and overhaul of vacuum gate valves for semiconductor manufacturing equipment. Mainly for VAT, HVA, etc. For sputtering (PVD), CVD, etching, and ion implantation (implantation/IMP) equipment...
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Regeneration of electrostatic chucks (ESC/E chucks) and heaters for sputtering (PVD) and CVD equipment. Compatible with Centura HDP, TXZ/WXZ/CXZ/DXZ, Producer, P5000 (P-5000), ENDURA5500, etc. Pla...
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Calibration service for UV illuminometers and probes made by OAI in the United States. Compatible with Model306/308/311/316/317/356/357/358/359/457/459/656/659, all 380 series. Probes are 365/400/...
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Regeneration of electrostatic chucks (ESC/E chucks) for etching equipment. Compatible with Centura DPS, Super-e, MXP+, TCP/Alliance 9400/9600, Exelan-Hpt, Flex, Kiyo, UNITY, 8500, DRM, SCCM, etc. P...
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PCB board repair for ion implantation (implantation/IMP) equipment. Compatible with General I/O DI board, IHC source controller PCB, etc. Repair on the premise that there are no missing board parts...
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Repair of HV power supply (high voltage power supply) for ion implantation (implantation/IMP) equipment. Power supply: OL8000/104/02 (A1010070), Stack: OL8000/104/01 (A1010080). Also compatible wi...
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Regular price ¥800,000
Sale price ¥800,000
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Repair of Kollmorgen motors for CMP equipment polishing heads. The motor mainly carries out bearing exchange. Compatible with Motor P/N: D101A-93-1215-001 or D101B-93-1210-014. For AMAT Reflexion....
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Regeneration of electrostatic chucks (ESC/E chucks) for ion implantation (implantation/IMP) equipment. Reproduction with upgrades that extend durability and lifespan than genuine products. Compati...
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Repair and overhaul (O/H, OH) of vacuum pumps (cryo, turbo, dry, rotary, etc.) for semiconductor manufacturing equipment. For sputtering (PVD), CVD, etching, and ion implantation (IMP). Helix: CT-...
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Repair and cleaning of HYT probes/particle monitors/sensors (sensors) for ion implantation (implantation/IMP) equipment. Laser diodes, beam stops, photodiodes (window photocells) can also be repla...
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Repair of main controller (control) box for coater (coater) developer, upgrade from #2 (hard-to-find floppy disk/FD) to #3.5 (with USB, HDD mirroring system, RAID, master/slave function). For TEL A...