Repair/overhaul with upgrade of QC Dry Side for cleaning equipment brush tanks. Compatible with P/N: 0010-25970. Performance such as weight reduction, corrosion resistance, and smooth rotation can ...
Repair/overhaul with upgrade of QC Wet Side for cleaning equipment brush tanks. Compatible with P/N: 0010-25969. Performance such as weight reduction, corrosion resistance, and smooth rotation can ...
Repair/overhaul with upgrade of QC gearbox for cleaning equipment brush tank. Compatible with P/N: 0010-25969/0021-18493. It is possible to achieve performance such as gear detachment prevention, p...
Cleaning and recycling service for aluminum (Al) anodized/alumina (Al2O3)/yttrium/yttrium (Y2O3) parts for etching equipment. Dry ice cleaning allows cleaning without damaging parts. Upper/lower e...
A recycling service for aluminum (Al) anodized/anodized parts for etching equipment. Upper/lower electrodes, electrodes, top/bottom plates, electrostatic chucks (ESC/E chucks), baffle plates, depo...
Repair and overhaul of vacuum gate valves for semiconductor manufacturing equipment. Mainly for VAT, HVA, etc. For sputtering (PVD), CVD, etching, and ion implantation (implantation/IMP) equipment...
Calibration service for UV illuminometers and probes made by OAI in the United States. Compatible with Model306/308/311/316/317/356/357/358/359/457/459/656/659, all 380 series. Probes are 365/400/...
Repair and overhaul (O/H, OH) of vacuum pumps (cryo, turbo, dry, rotary, etc.) for semiconductor manufacturing equipment. For sputtering (PVD), CVD, etching, and ion implantation (IMP). Helix: CT-...
Wafer/wafer/wafer brush roller assembly repair/overhaul for brush tank parts for CMP cleaning equipment. Compatible parts such as genuine P/N: 0021-13858/0010-23807. For CMP cleaning equipment MES...
Repair of slurry motor (tube pump) for CMP equipment. Overhaul including internal cleaning (cleaning) with dry ice cleaning and carbon brush and bearing replacement. P/N: 0090-77057/0090-77135 or ...
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