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・品名:CT/OB-8 15K Array ・Description:Cryo Torr-8クライオポンプまたはOn Board-8クライオポンプに適しています。 ・純正P/N:CT008V030
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CMP装置用ターンテーブルモーターの修理/オーバーホール。主にベアリングの交換。P/N:C-5172-042-0001/K89EB7341B。EBARA(荏原) EPO用。形状や型番は写真と異なる場合あり(都度要問い合わせ)。
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Repair/overhaul with upgrade of QC Dry Side for cleaning equipment brush tanks. Compatible with P/N: 0010-25970. Performance such as weight reduction, corrosion resistance, and smooth rotation can ...
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Repair/overhaul with upgrade of QC Wet Side for cleaning equipment brush tanks. Compatible with P/N: 0010-25969. Performance such as weight reduction, corrosion resistance, and smooth rotation can ...
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Repair/overhaul with upgrade of QC gearbox for cleaning equipment brush tank. Compatible with P/N: 0010-25969/0021-18493. It is possible to achieve performance such as gear detachment prevention, p...
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Cleaning and recycling service for aluminum (Al) anodized/alumina (Al2O3)/yttrium/yttrium (Y2O3) parts for etching equipment. Dry ice cleaning allows cleaning without damaging parts. Upper/lower e...
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A recycling service for aluminum (Al) anodized/anodized parts for etching equipment. Upper/lower electrodes, electrodes, top/bottom plates, electrostatic chucks (ESC/E chucks), baffle plates, depo...
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Repair and overhaul of vacuum gate valves for semiconductor manufacturing equipment. Mainly for VAT, HVA, etc. For sputtering (PVD), CVD, etching, and ion implantation (implantation/IMP) equipment...
Regular price from ¥100,000
Sale price from ¥100,000
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Calibration service for UV illuminometers and probes made by OAI in the United States. Compatible with Model306/308/311/316/317/356/357/358/359/457/459/656/659, all 380 series. Probes are 365/400/...
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Repair and overhaul (O/H, OH) of vacuum pumps (cryo, turbo, dry, rotary, etc.) for semiconductor manufacturing equipment. For sputtering (PVD), CVD, etching, and ion implantation (IMP). Helix: CT-...
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Regular price ¥500,000
Sale price ¥500,000
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Wafer/wafer/wafer brush roller assembly repair/overhaul for brush tank parts for CMP cleaning equipment. Compatible parts such as genuine P/N: 0021-13858/0010-23807. For CMP cleaning equipment MES...
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Regular price ¥50,000
Sale price ¥50,000
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Repair of slurry motor (tube pump) for CMP equipment. Overhaul including internal cleaning (cleaning) with dry ice cleaning and carbon brush and bearing replacement. P/N: 0090-77057/0090-77135 or ...