A recycling service for aluminum (Al) anodized/anodized parts for etching equipment. Upper/lower electrodes, electrodes, top/bottom plates, electrostatic chucks (ESC/E chucks), baffle plates, depo...
An upgrade that remodels the ion source (ion source) of the ion implantation (implant/IMP) system from the standard Bernas type to the IHC (cathode) type. A long life ion source can be realized. An...
Repair and overhaul of vacuum gate valves for semiconductor manufacturing equipment. Mainly for VAT, HVA, etc. For sputtering (PVD), CVD, etching, and ion implantation (implantation/IMP) equipment...
Regeneration of electrostatic chucks (ESC/E chucks) and heaters for sputtering (PVD) and CVD equipment. Compatible with Centura HDP, TXZ/WXZ/CXZ/DXZ, Producer, P5000 (P-5000), ENDURA5500, etc. Pla...
Calibration service for UV illuminometers and probes made by OAI in the United States. Compatible with Model306/308/311/316/317/356/357/358/359/457/459/656/659, all 380 series. Probes are 365/400/...
PCB board repair for ion implantation (implantation/IMP) equipment. Compatible with General I/O DI board, IHC source controller PCB, etc. Repair on the premise that there are no missing board parts...
Repair of HV power supply (high voltage power supply) for ion implantation (implantation/IMP) equipment. Power supply: OL8000/104/02 (A1010070), Stack: OL8000/104/01 (A1010080). Also compatible wi...
Repair of Kollmorgen motors for CMP equipment polishing heads. The motor mainly carries out bearing exchange. Compatible with Motor P/N: D101A-93-1215-001 or D101B-93-1210-014. For AMAT Reflexion....
Regeneration of electrostatic chucks (ESC/E chucks) for ion implantation (implantation/IMP) equipment. Reproduction with upgrades that extend durability and lifespan than genuine products. Compati...
Repair and overhaul (O/H, OH) of vacuum pumps (cryo, turbo, dry, rotary, etc.) for semiconductor manufacturing equipment. For sputtering (PVD), CVD, etching, and ion implantation (IMP). Helix: CT-...
Repair and cleaning of HYT probes/particle monitors/sensors (sensors) for ion implantation (implantation/IMP) equipment. Laser diodes, beam stops, photodiodes (window photocells) can also be repla...
Repair of main controller (control) box for coater (coater) developer, upgrade from #2 (hard-to-find floppy disk/FD) to #3.5 (with USB, HDD mirroring system, RAID, master/slave function). For TEL A...
Repair of FABS robot for CMP equipment. Made by Rorze. After the repair, the robot is checked for operation with a dedicated test machine. The manufacturer model is RR700L150-Z30-010. It is also po...
Wet robot repair for CMP equipment. Motors, lead screws, ribbon cables, PCBs and vacuum transducers can also be replaced. After repair, robot axis forming and initialization were performed on the M...
Repair of ISRM modules for CMP equipment. Repair of the laser module that senses the endpoint of the CMP. Digital ISRM and full scan ISRM assy can be repaired. Repair on the premise that there is n...
Repair of CPU board of CMP equipment. Compatible with MEI, FABS CPU, AIO/DIO, Pentium, lower electric board, etc. Repair on the premise that there are no missing board parts and no burn marks. P/N:...
Repair of platens for CMP equipment. Surface polishing/flattening, elastomer re-coating (black Teflon or genuine gray: Everslick), re-insertion of helisert, repair of screw holes, etc. Compatible w...
Repair of head sweep motor Assy for CMP equipment. Repair with upgrade that improved the cable cut problem found in genuine products. P/N: 0010-77217, 0010-03697. For AMAT Mirra 8" (200mm).
For ...
Repair/refurbishment/overhaul of HCLU load cups for CMP equipment. Full OH including cleaning, coat stripping, center shaft and other major parts replacement. Black stick coating has the effect of...
Repair of slurry motor (tube pump) for CMP equipment. Overhaul including internal cleaning (cleaning) with dry ice cleaning and carbon brush and bearing replacement. P/N: 0090-77057/0090-77135 or ...
Repair of platen motor servo pack (driver) for CMP equipment. The servo back is Yaskawa P/N: SGDB-44ADG. Yaskawa P/N: 1080-01170 or SGMS-50A6AB can be repaired for the platen motor. Possibility of ...
Repair of platen motors and gearboxes for CMP equipment. Yaskawa P/N: 1080-01170 or SGMS-50A6AB for platen motor, Alpha P/N: 3970-01013 or 140-MFI-10-141-000 for gearbox, Stober, Compatible with Ya...
Repair of cross pedestal (harmonic drive) assembly for CMP equipment. Repair service including standard repair or replacement of new harmonic gear. P/N: 0010-26153 (Old: 0010-77141). For AMAT Mirra...
