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PHOTOLITHOGRAPHY

28 products
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Single-sided mask aligner (adhesion/proximity/contact exposure) equipment. It is compact and easy to install because it is a desk/tabletop type. Manual type. For research and development (R&D)...
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Single-sided mask aligner (adhesion/proximity/contact exposure) system. Benchtop type, compact and easy to install. Manual type. For research and development (R&D). reasonable. For medium-sized...
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Double-sided mask aligner (adhesion/proximity/contact exposure) system. optical. Alignment of top or bottom surface is possible. Semi-automatic/semi-automatic. For research and development (R&...
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Single-sided mask aligner (adhesion/proximity/contact exposure) equipment. Optical back exposure type. Fully automatic/fully automatic. For semiconductors, MEMS, research and development (R&D)....
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Single-sided mask aligner (adhesion/proximity/contact exposure) system. optical. Fully automatic/fully automatic. For liquid crystal/FPD/LCD/flat panel displays and medium mass production. Large s...
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Single-sided mask aligner (adhesion/proximity/contact exposure) system. optical. Fully automatic/fully automatic. For medium volume production. Flood exposure/edge bead exposure is possible. For e...
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UV LED light source (Light source). Collimated light source for photolithography/exposure/photolithography applications. Made by OAI. For semiconductors, MEMS, research and development (R&D), ...
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UV light source (Light source). Collimated light source for photolithography/exposure/photolithography applications. Made by OAI. For semiconductors, MEMS, research and development (R&D), low ...
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Regular price ¥2,300,000
Sale price ¥2,300,000
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Handy type UV illuminance meter (power meter) with touch screen and built-in USB. The successor model of the old model 358 manufactured by OAI. Calibration service is also available. We also sell d...
Regular price from ¥320,000
Sale price from ¥320,000
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Handy type UV illumination meter (Power Meter). The successor model of the old model 306 manufactured by OAI. Calibration service is also available. We also sell dedicated probes (365nm, 400nm, 420...
Regular price from ¥220,000
Sale price from ¥220,000
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Dedicated probe for UV illuminance meter (Power Meter) Model 308 (365nm, 400nm, 420nm, 436nm, etc.). The successor model of the old model 306 manufactured by OAI. Calibration service is also availa...
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Regular price ¥120,000,000
Sale price ¥120,000,000
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Desktop type nano-pattern exposure (photolithography) equipment. Using the Talbot effect, it is possible to perform batch exposure with a half-pitch of 150 nm for periodic structures. Ideal for de...
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Regular price ¥6,000,000
Sale price ¥6,000,000
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Nanoimprint equipment for UV exposure (lithography). This equipment is suitable for pattern transfer to substrates with unevenness and undulations such as resin and film. Manual type. A method in ...
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Regular price ¥40,000,000
Sale price ¥40,000,000
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Nanoimprint equipment for UV exposure (lithography). This equipment is suitable for pattern transfer to substrates with unevenness and undulations such as resin and film. Semi-automatic (semi-autom...
Regular price ¥860,000
Sale price ¥860,000
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1台でレジスト塗布(コート)、エッチング、洗浄、乾燥が可能な多目的/マルチスピンプロセッサー(スピンコーター/スピンナー/スピナー)Polosの150mm(6インチ基板用)以下の基板対応機。チャック/アダプター使用で小片/チップの処理も可能。NPP(ポリプロピレン)、PTFE(テフロン)から選択可。 ※※受注生産品になります。納期は別途ご確認お願いします。 【使用可能基板サイズ】 最大 φ...
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Regular price ¥1,370,000
Sale price ¥1,370,000
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1台でレジスト塗布(コート)、エッチング、洗浄、乾燥が可能な多目的/マルチスピンプロセッサー(スピンコーター/スピンナー/スピナー)Polosの200mm(8インチ基板用)以下の基板対応機。チャック/アダプター使用で小片/チップの処理も可能。NPP(ポリプロピレン)、PTFE(テフロン)から選択可。 ※※受注生産品になります。納期は別途ご確認お願いします。 【使用可能基板サイズ】 最大 φ...
Regular price from ¥50,000
Sale price from ¥50,000
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Multi-purpose/multi-spin processor (spin coater/spinner/spinner) Vacuum chuck (adapter) for holding substrates for Polos. For wafer/wafer/wafer. For more information is here Standard Ch...
Regular price from ¥130,000
Sale price from ¥130,000
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Non-vacuum mechanical chuck (adapter) for holding substrates for multi-purpose/multi-spin processors (spin coater/spinner/spinner) Polos. For wafer/wafer/wafer. For more information is here ...
Regular price from ¥30,000
Sale price from ¥30,000
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Multi-purpose/multi-spin processor (spin coater/spinner/spinner) Vacuum chuck (adapter) for holding substrates for Polos. For small pieces/chips. For more information is here Standard C...
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Regular price ¥60,000
Sale price ¥60,000
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Multi-purpose/multi-spin processor (spin coater/spinner/spinner) Vacuum chuck (adapter) for holding substrates for Polos. For small pieces/chips. For more information is here Part No. ...
Regular price ¥150,000
Sale price ¥150,000
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多目的/マルチスピンプロセッサー(スピンコーター/スピンナー/スピナー)Polos Spin 150x用の基板保持用のポーラスインレーチャック(アダプター)。ウェハ/ウェーハ/ウェハー用。10mm×10mm×100μmt用の真空チャック。6,000rpmも使用可能。 詳しくはこちらから
Regular price ¥170,000
Sale price ¥170,000
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Vacuum pump for multi-purpose/multi-spin processors (spin coaters/spinners/spinners) Polos. Spin150i, Spin200i, Spin300i. *Photo shows VP-230V For more information is here
Regular price from ¥80,000
Sale price from ¥80,000
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Multi-purpose/multi-spin processor (spin coater/spinner/spinner) Centering tool (jig) for Polos Spin150i/200i/300. For 150i, φ2 to φ6 inch, up to 4 inch square board, for 200i, up to φ2 to φ8 inch...
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Regular price ¥8,220,000
Sale price ¥8,220,000
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POLOS microwriter that enables optical exposure (photolithography). With confocal microscope. Equipped with microlaser control software. Mainly for 405nm laser. For research and development (R&...