ISRM Module Repair ISRM Module Repair

Repair of ISRM modules for CMP equipment. Repair of the laser module that senses the endpoint of the CMP. Digital ISRM and full scan ISRM assy can be repaired. Repair on the premise that there is no submergence or burn marks. P/N: 0010-04514/0010-05004/0010-77057/0010-07620/0010-07729/0010-05002/0010-77264/0010-37866. For AMAT Mirra.

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