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CMP

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CMP装置用ターンテーブルモーターの修理/オーバーホール。主にベアリングの交換。P/N:C-5172-042-0001/K89EB7341B。EBARA(荏原) EPO用。形状や型番は写真と異なる場合あり(都度要問い合わせ)。
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Repair/overhaul with upgrade of QC Dry Side for cleaning equipment brush tanks. Compatible with P/N: 0010-25970. Performance such as weight reduction, corrosion resistance, and smooth rotation can ...
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Repair/overhaul with upgrade of QC Wet Side for cleaning equipment brush tanks. Compatible with P/N: 0010-25969. Performance such as weight reduction, corrosion resistance, and smooth rotation can ...
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Repair/overhaul with upgrade of QC gearbox for cleaning equipment brush tank. Compatible with P/N: 0010-25969/0021-18493. It is possible to achieve performance such as gear detachment prevention, p...
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Regular price ¥800,000
Sale price ¥800,000
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Repair of Kollmorgen motors for CMP equipment polishing heads. The motor mainly carries out bearing exchange. Compatible with Motor P/N: D101A-93-1215-001 or D101B-93-1210-014. For AMAT Reflexion....
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Repair of FABS robot for CMP equipment. Made by Rorze. After the repair, the robot is checked for operation with a dedicated test machine. The manufacturer model is RR700L150-Z30-010. It is also po...
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Wet robot repair for CMP equipment. Motors, lead screws, ribbon cables, PCBs and vacuum transducers can also be replaced. After repair, robot axis forming and initialization were performed on the M...
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Repair of ISRM modules for CMP equipment. Repair of the laser module that senses the endpoint of the CMP. Digital ISRM and full scan ISRM assy can be repaired. Repair on the premise that there is n...
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Repair of CPU board of CMP equipment. Compatible with MEI, FABS CPU, AIO/DIO, Pentium, lower electric board, etc. Repair on the premise that there are no missing board parts and no burn marks. P/N:...
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Repair of platens for CMP equipment. Surface polishing/flattening, elastomer re-coating (black Teflon or genuine gray: Everslick), re-insertion of helisert, repair of screw holes, etc. Compatible w...
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Regular price ¥450,000
Sale price ¥450,000
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Repair of head sweep motor Assy for CMP equipment. Repair with upgrade that improved the cable cut problem found in genuine products. P/N: 0010-77217, 0010-03697. For AMAT Mirra 8" (200mm). For ...
Regular price from ¥80,000
Sale price from ¥80,000
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Repair/refurbishment/overhaul of HCLU load cups for CMP equipment. Full OH including cleaning, coat stripping, center shaft and other major parts replacement. Black stick coating has the effect of...
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Regular price ¥50,000
Sale price ¥50,000
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Repair of slurry motor (tube pump) for CMP equipment. Overhaul including internal cleaning (cleaning) with dry ice cleaning and carbon brush and bearing replacement. P/N: 0090-77057/0090-77135 or ...
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Regular price ¥560,000
Sale price ¥560,000
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Repair of platen motor servo pack (driver) for CMP equipment. The servo back is Yaskawa P/N: SGDB-44ADG. Yaskawa P/N: 1080-01170 or SGMS-50A6AB can be repaired for the platen motor. Possibility of ...
Regular price from ¥700,000
Sale price from ¥700,000
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Repair of platen motors and gearboxes for CMP equipment. Yaskawa P/N: 1080-01170 or SGMS-50A6AB for platen motor, Alpha P/N: 3970-01013 or 140-MFI-10-141-000 for gearbox, Stober, Compatible with Ya...
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Regular price ¥3,200,000
Sale price ¥3,200,000
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Repair of cross pedestal (harmonic drive) assembly for CMP equipment. Repair service including standard repair or replacement of new harmonic gear. P/N: 0010-26153 (Old: 0010-77141). For AMAT Mirra...
Regular price from ¥190,000
Sale price from ¥190,000
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Repair/refurbishment of megatorque motors and drivers/controllers for CMP machine polishing heads. Mainly compatible with NSK products. The motor mainly carries out bearing exchange. Motor P/N: RZ...
Regular price from ¥350,000
Sale price from ¥350,000
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Repair/refurbishment/overhaul of rotary unions for CMP equipment polishing heads. Mainly for Dublin products. Supports 3/4/6/8 ports (zones). Back collection, parts exchange, reassembly, testing. ...
Regular price from ¥850,000
Sale price from ¥850,000
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Repair of spindle shaft for CMP equipment. Service including standard repair (cleaning + splash guard powder coating + bearing 4 replacement) and new spindle shaft replacement. Compatible with P/N:...
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Regular price ¥500,000
Sale price ¥500,000
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Wafer/wafer/wafer brush roller assembly repair/overhaul for brush tank parts for CMP cleaning equipment. Compatible parts such as genuine P/N: 0021-13858/0010-23807. For CMP cleaning equipment MES...