ETCH

6 products

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8インチポリイミド静電チャック再生(ESC/Eチャック) 8INCH Polyimide ECHUCK(ESC) Refurbishment

ASK

エッチング(Etching)装置用の静電チャック(ESC/Eチャック)の再生。アルミ(Al)アルマイト(アノダイズ)再生＋ESC貼り換え、ESC貼り換えのみの二通りの再生。8インチ(200mm)用。AMAT(Applied Materials)。P/N:0041-34688/0010-10327/0040-99949の互換品。※写真は代表的なものを載せているため、実物と異なる場合があります。

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Anodized Aluminum・Al2O3/Y2O3 parts refurbishment

ASK

Cleaning and recycling service for aluminum (Al) anodized/alumina (Al2O3)/yttrium/yttrium (Y2O3) parts for etching equipment. Dry ice cleaning allows cleaning without damaging parts. Upper/lower e...

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ASK

A recycling service for aluminum (Al) anodized/anodized parts for etching equipment. Upper/lower electrodes, electrodes, top/bottom plates, electrostatic chucks (ESC/E chucks), baffle plates, depo...

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Vacuum Valve Repair/Overhaul Vacuum Valve Repair/Overhaul

ASK

Repair and overhaul of vacuum gate valves for semiconductor manufacturing equipment. Mainly for VAT, HVA, etc. For sputtering (PVD), CVD, etching, and ion implantation (implantation/IMP) equipment...

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Electrostatic Chuck (ESC/E Chuck) Refurbishment Echuck/E-Chuck Refurbishment

ASK

Regeneration of electrostatic chucks (ESC/E chucks) for etching equipment. Compatible with Centura DPS, Super-e, MXP+, TCP/Alliance 9400/9600, Exelan-Hpt, Flex, Kiyo, UNITY, 8500, DRM, SCCM, etc. P...

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Vacuum Pump (Cryo/Turbo/Dry/Rotary) Repair/Overhaul

ASK

Repair and overhaul (O/H, OH) of vacuum pumps (cryo, turbo, dry, rotary, etc.) for semiconductor manufacturing equipment. For sputtering (PVD), CVD, etching, and ion implantation (IMP). Helix: CT-...