Cleaning and recycling service for aluminum (Al) anodized/alumina (Al2O3)/yttrium/yttrium (Y2O3) parts for etching equipment. Dry ice cleaning allows cleaning without damaging parts. Upper/lower e...
A recycling service for aluminum (Al) anodized/anodized parts for etching equipment. Upper/lower electrodes, electrodes, top/bottom plates, electrostatic chucks (ESC/E chucks), baffle plates, depo...
Repair and overhaul of vacuum gate valves for semiconductor manufacturing equipment. Mainly for VAT, HVA, etc. For sputtering (PVD), CVD, etching, and ion implantation (implantation/IMP) equipment...
Repair and overhaul (O/H, OH) of vacuum pumps (cryo, turbo, dry, rotary, etc.) for semiconductor manufacturing equipment. For sputtering (PVD), CVD, etching, and ion implantation (IMP). Helix: CT-...
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