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chuck cleaning wafer

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Resin vacuum table 3 layers 12, 8, 6, 5, 4 inch plate replaceable type Resin vacuum table 3 layers 12, 8, 6, 5, 4 inch plate replaceable type
from ¥310,000
from ¥310,000
Resin vacuum table 3-layer type. Multipurpose jig for 4, 5, 6, 8, 12 inch chuck cleaning wafers (CCW). Used to fix CCW when playing CCW. Since it is made of resin, the risk of scratches and partic...
Resin vacuum table 2 layers 12, 8, 6, 5, 4 inches, dedicated type for each inch Resin vacuum table 2 layers 12, 8, 6, 5, 4 inches, dedicated type for each inch
from ¥200,000
from ¥200,000
Resin vacuum table 2-layer type. Dedicated jig for 4, 5, 6, 8, 12 inch chuck cleaning wafers (CCW). Used to fix CCW when playing CCW. Since it is made of resin, the risk of scratches and particle ...
Particle Removal Film (PRF) Particle Removal Film (PRF)
from ¥29,000
from ¥29,000
¥0
A cleaning sheet for recycling chuck cleaning wafers (CCW). 3 types of lineup for 4, 5, 6, 8, 12 inch CCW (7, 9, 13 inch square). Dedicated CCW for ETCH (etching) / sputtering (PVD). RNP-PRF-125...
Defect Removal Film (DRF) Defect Removal Film (DRF)
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A cleaning sheet for recycling chuck cleaning wafers (CCW). 3 types of lineup for 4, 5, 6, 8, 12 inch CCW (7, 9, 13 inch square). Exclusively for CCW for photolithography/exposure. RNC-DRF-1255(...
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Chuck Cleaning Wafer 8 inch Chuck Cleaning Wafer 8 inch
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Cleaning wafer to remove dirt/dust/particles on vacuum/vacuum/electrostatic/mechanical/pin chuck. Effective in reducing dummy wafer/wafer/wafer/wafer/wafer/wafer loss, reducing equipment downtime, ...
Chuck Cleaning Wafer 6 inch Chuck Cleaning Wafer 6 inch
ASK
Cleaning wafer to remove dirt/dust/particles on vacuum/vacuum/electrostatic/mechanical/pin chuck. Effective in reducing dummy wafer/wafer/wafer/wafer/wafer/wafer loss, reducing equipment downtime,...
Chuck Cleaning Wafer for Glass Mask 6025 Chuck Cleaning Wafer for Glass Mask 6025
ASK
Cleaning wafer to remove dirt/dust/particles on vacuum/vacuum/electrostatic/mechanical/pin chuck. Effective in reducing dummy wafer/wafer/wafer/wafer/wafer/wafer loss, reducing equipment downtime, ...
Chuck Cleaning Wafer 5 inch Chuck Cleaning Wafer 5 inch
ASK
Cleaning wafer to remove dirt/dust/particles on vacuum/vacuum/electrostatic/mechanical/pin chuck. Effective in reducing dummy wafer/wafer/wafer/wafer/wafer/wafer loss, reducing equipment downtime, ...
Chuck Cleaning Wafer 4 inch Chuck Cleaning Wafer 4 inch
from ¥0
from ¥0
Cleaning wafer to remove dirt/dust/particles on vacuum/vacuum/electrostatic/mechanical/pin chuck. Effective in reducing dummy wafer/wafer/wafer/wafer/wafer/wafer loss, reducing equipment downtime,...
Chuck Cleaning Wafer 12 inch Chuck Cleaning Wafer 12 inch
ASK
Cleaning wafer to remove dirt/dust/particles on vacuum/vacuum/electrostatic/mechanical/pin chuck. Effective in reducing dummy wafer/wafer/wafer/wafer/wafer/wafer loss, reducing equipment downtime, ...
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φ8 φ8
¥187,200
¥187,200
 【内訳】 8インチ⽤チャッククリーニングウェハ（CCW） ・RNC-SCB-0043NG7 強粘タイプ　1枚・・・主にETCH/PVD⽤   8インチ⽤CCW⽤9インチ□パーティクルリムーバルフィルム（PRF）1セット＝10枚⼊ ・RNP-PRF-1038（シリコーン系CCW⽤）
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Polymer Roller for PRF assistance Polymer Roller for PRF assistance
¥7,000
¥7,000
A resin roller used when recycling chuck cleaning wafers (CCW). A part for pressing the Particle Removal Film (PRF) against the CCW that has been adsorbed on the vacuum table while expelling air b...
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Vacuum Pump for polymer vacuum plate for CCW recycle
¥90,000
¥90,000
Vacuum pump manufactured by Nitto Kohki. P/N: VP0940. Dedicated pump for vacuum table used when regenerating chuck cleaning wafer (CCW). Ultimate vacuum pressure: -53.3kPa, Discharge air volume:...