Head Sweep Motor Assy Repair Head Sweep Motor Repair

Repair of head sweep motor Assy for CMP equipment. Repair with upgrade that improved the cable cut problem found in genuine products. P/N: 0010-77217, 0010-03697. For AMAT Mirra 8" (200mm).

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【details of repair】

• Headsweep is fully inspected upon receipt
• A2 and A3 assemblies are modified to Balanceworx keyed design
• Bearings replaced and/or repacked
• Ball nut and lead screws replaced or cleaned & re-greased
• Lead screw is replaced as required
• OEM clamps are split and utilized with two screws for clamping to ensure uniform pressure
• Cable harness replaced
• Motor/cable can be 'clocked' 90° to prevent cable stress
• Lead screw TIR is verified to be less than .003″
• All assemblies bench tested and cycled (forward & reverse motion)
• Includes C of C printed on cleanroom paper