SafeGuard wafer transfer (WHS-T1)
l 76 mm ～ 200 mm のウェーハ用の精密ロボット制御
l 薄い、反りのある、高価なウェーハを丁寧に処理
l コンパクトでメンテナンスの手間が少ない ISO 3 (クラス 1) 設計
l 設定を調整できるプログラム可能なタッチスクリーン
l オプションの反転カセット転送機能
【仕様】
76mm（φ3...
Automatic wafer transfer
l SEMI準拠カセット間の自動ウェーハ転送
l 76mm、100mm、150mm、200mmウェーハに対応
l 安全センサーを内蔵したタッチスクリーン制御
l クリーンルームでの使用に適した帯電防止、耐薬品性素材
l 半導体向けISO 4およびCE認証
【仕様】
76mm（φ3インチ用）
パーツNo.：WHS-T2-301
...
Manual wafer transfer (WHS-T3)
l 76 mm ～ 200 mm のウェハーを手動で搬送
l UHMW ベアリングを備えたメンテナンスフリーのスライド レール
l SEMI 準拠の高/低プロファイル カセットで動作
l 帯電防止、耐薬品性、ISO 4 クリーンルーム対応
l ウェハーの反転/反転用のオプション モデル
【仕様】
76mm（φ3イン...
Wafer/wafer/wafer (substrate) holder for chemical etching, electrolytic etching, and electrolytic plating (plating). A clamp type structure that prevents etchant/electrolyte from entering the back ...
Wafer/wafer/wafer (substrate) holder for chemical etching, electrolytic etching, and electrolytic plating (plating). A clamp type structure that prevents etchant/electrolyte from entering the back...
Wafer/wafer/wafer (substrate) holder for chemical etching, electrolytic etching, and electrolytic plating (plating). A clamp type structure that prevents etchant/electrolyte from entering the back ...
Wafer/wafer/wafer (substrate) holder for chemical etching, electrolytic etching, and electrolytic plating. A clamp type structure that prevents etchant/electrolyte from entering the back of the su...
Wafer/wafer/wafer (substrate) holder for chemical etching, electrolytic etching, and electrolytic plating (plating). A clamp type structure that prevents etchant/electrolyte from entering the back...
Wafer/wafer/wafer (substrate) holder for chemical etching, electrolytic etching, and electrolytic plating (plating). A clamp type structure that prevents etchant/electrolyte from entering the back...
Wafer/wafer/wafer (substrate) holder for chemical etching, electrolytic etching, and electrolytic plating (plating). A clamp type structure that prevents etchant/electrolyte from entering the back...
Multi-purpose/multi-spin processor (spin coater/spinner/spinner) Centering tool (jig) for Polos Spin150i/200i/300. For 150i, φ2 to φ6 inch, up to 4 inch square board, for 200i, up to φ2 to φ8 inch...
Vacuum pump for multi-purpose/multi-spin processors (spin coaters/spinners/spinners) Polos. Spin150i, Spin200i, Spin300i.
*Photo shows VP-230V
For more information is here
Multi-purpose/multi-spin processor (spin coater/spinner/spinner) Vacuum chuck (adapter) for holding substrates for Polos. For small pieces/chips.
For more information is here
Part No.
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Multi-purpose/multi-spin processor (spin coater/spinner/spinner) Vacuum chuck (adapter) for holding substrates for Polos. For small pieces/chips.
For more information is here
Standard C...
Non-vacuum mechanical chuck (adapter) for holding substrates for multi-purpose/multi-spin processors (spin coater/spinner/spinner) Polos. For wafer/wafer/wafer.
For more information is here
...
Multi-purpose/multi-spin processor (spin coater/spinner/spinner) Vacuum chuck (adapter) for holding substrates for Polos. For wafer/wafer/wafer.
For more information is here
Standard Ch...
A washing machine (equipment) that removes dirt with dry ice. A method in which crushed dry ice pellets collide with an object (base material). Effective for removal of deposits (attachments) of pa...
A washing machine (equipment) that removes dirt with dry ice. A method in which crushed dry ice pellets collide with an object (base material). Effective for removal of deposits (attachments) of p...
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