Ion Source Upgrade

An upgrade that remodels the ion source (ion source) of the ion implantation (implant/IMP) system from the standard Bernas type to the IHC (cathode) type. A long life ion source can be realized. An additional cathode power supply is also available. Compatible with VIISion, VISTA, GSD, PI9500 (PI-9500) XR/XR80, etc.