Heater, Echuck/E-Chuck Refurbishment

Regeneration of electrostatic chucks (ESC/E chucks) and heaters for sputtering (PVD) and CVD equipment. Compatible with Centura HDP, TXZ/WXZ/CXZ/DXZ, Producer, P5000 (P-5000), ENDURA5500, etc. Playback content can be selected according to the damage situation. Mainly for AMAT 8, 12 inches (200, 300mm). P/N: 0040-18219/0040-48594, 0010-04449, 0010-03341M, 0010-70252 etc.

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