Model 6020 Automatic mask aligner for large substrates for mass production

Name: Model 6020 Automatic mask aligner for large substrates for mass production
Brand: 協同インターナショナル
Availability: OutOfStock

協同インターナショナル

ASK

Single-sided mask aligner (adhesion/proximity/contact exposure) system. optical. Fully automatic/fully automatic. For liquid crystal/FPD/LCD/flat panel displays and medium mass production. Large substrates (up to 20″×20″). All-computer control. Made by OAI.

For more information is here

model	6020
Substrate size	12" square – up to 20" square
Mask size	14" square – up to 24" square
Alignment stage control	Z motion: 1500µm
Alignment accuracy	One side: 0.5 μm Both sides: 1 μm
Exposure time	1s-999s (0.1s interval)
Exposure Mode: Resolution	Proximity: 5μm Soft contact: 3-5μm Hard contact: 2-3 μm Vacuum contact: <2μm
throughput	-
Incidental equipment	Power supply : 400V or 208V, 3P5 wire vacuum line, air line or N2 line, exhaust line
size	71530mmH x 76825mmW x 36290mmD

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