1台でレジスト塗布(コート)、エッチング、洗浄、乾燥が可能な多目的/マルチスピンプロセッサー(スピンコーター/スピンナー/スピナー)Polosの150mm(6インチ基板用)以下の基板対応機。チャック/アダプター使用で小片/チップの処理も可能。NPP(ポリプロピレン)、PTFE(テフロン)から選択可。
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【使用可能基板サイズ】
l 最大...
A printer option to add to the VSP-G1 desktop device that produces nanoparticles. Nanoparticles can be printed on the substrate by using together with G1. It is possible to create high-purity inor...
Power supply (power supply). Optional parts (parts) for desktop type plating (plating) systems (equipment). It is characterized by being able to form a film without going around to the backside of...
hose pump. Optional parts (parts) for desktop type plating (plating) systems (equipment). It is characterized by being able to form a film without going around to the backside of the substrate. Sp...
temperature control. Option for desktop type plating (plating) system (equipment). It is characterized by being able to form a film without going around to the backside of the substrate. Space sav...
Electrolyte tank with cover. Optional parts (parts) for desktop type plating (plating) systems (equipment). It is characterized by being able to form a film without going around to the backside of...
Desktop-type plating (plating) system (equipment). It is characterized by being able to form a film without going around to the backside of the substrate. Good in-plane distribution and reproducib...
Desktop-sized hot plate suitable for pre-baking and post-baking. Customization is possible according to the application. Precision temperature control with alert sound function. For research and d...
Wafer/wafer/wafer (substrate) holder for chemical etching, electrolytic etching, and electrolytic plating (plating). A clamp type structure that prevents etchant/electrolyte from entering the back ...
Wafer/wafer/wafer (substrate) holder for chemical etching, electrolytic etching, and electrolytic plating (plating). A clamp type structure that prevents etchant/electrolyte from entering the back...
Wafer/wafer/wafer (substrate) holder for chemical etching, electrolytic etching, and electrolytic plating (plating). A clamp type structure that prevents etchant/electrolyte from entering the back ...
Wafer/wafer/wafer (substrate) holder for chemical etching, electrolytic etching, and electrolytic plating. A clamp type structure that prevents etchant/electrolyte from entering the back of the su...
Wafer/wafer/wafer (substrate) holder for chemical etching, electrolytic etching, and electrolytic plating (plating). A clamp type structure that prevents etchant/electrolyte from entering the back...
Wafer/wafer/wafer (substrate) holder for chemical etching, electrolytic etching, and electrolytic plating (plating). A clamp type structure that prevents etchant/electrolyte from entering the back...
Wafer/wafer/wafer (substrate) holder for chemical etching, electrolytic etching, and electrolytic plating (plating). A clamp type structure that prevents etchant/electrolyte from entering the back...
Multi-purpose/multi-spin processor (spin coater/spinner/spinner) Centering tool (jig) for Polos Spin150i/200i/300. For 150i, φ2 to φ6 inch, up to 4 inch square board, for 200i, up to φ2 to φ8 inch...
Vacuum pump for multi-purpose/multi-spin processors (spin coaters/spinners/spinners) Polos. Spin150i, Spin200i, Spin300i.
*Photo shows VP-230V
For more information is here
Multi-purpose/multi-spin processor (spin coater/spinner/spinner) Vacuum chuck (adapter) for holding substrates for Polos. For small pieces/chips.
For more information is here
Part No.
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Multi-purpose/multi-spin processor (spin coater/spinner/spinner) Vacuum chuck (adapter) for holding substrates for Polos. For small pieces/chips.
For more information is here
Standard C...
Non-vacuum mechanical chuck (adapter) for holding substrates for multi-purpose/multi-spin processors (spin coater/spinner/spinner) Polos. For wafer/wafer/wafer.
For more information is here
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Multi-purpose/multi-spin processor (spin coater/spinner/spinner) Vacuum chuck (adapter) for holding substrates for Polos. For wafer/wafer/wafer.
For more information is here
Standard Ch...
POLOS microwriter that enables optical exposure (photolithography). With confocal microscope. Equipped with microlaser control software. Mainly for 405nm laser. For research and development (R&...
