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Repair and overhaul of vacuum gate valves for semiconductor manufacturing equipment. Mainly for VAT, HVA, etc. For sputtering (PVD), CVD, etching, and ion implantation (implantation/IMP) equipment. Compatible with VAT series 010/02/03/04/075/10/12/14/15/16.2/61/65, SMC XGT200/300, etc.
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