Anodized Aluminum・Al2O3/Y2O3 parts refurbishment

Cleaning and recycling service for aluminum (Al) anodized/alumina (Al2O3)/yttrium/yttrium (Y2O3) parts for etching equipment. Dry ice cleaning allows cleaning without damaging parts. Upper/lower electrodes, electrodes, top/bottom plates, electrostatic chucks (ESC/E chucks), baffle plates, deposit shields, etc.

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