Upgrade model of UPA pressure transducer for CMP equipment. Available for all head zone pressures (RR, IT. PP, EC, UC). For AMAT Mirra. For 8 inch/200mm.
【Features】 1. Combining a pressure trans...
Sale of PM reduction kit (upgrade model) for CMP equipment. Consists of Interplaten Clean, Splash Guard (Long, Short), Slurry Arm Base Holder. Designed to prevent slurry residue from remaining. For...
Sales of Smif indexers for CMP equipment. The robot is Rorze. Standard repair or repair service by special parts replacement is also available. P/N: Compatible with RE201-822-005. For AMAT Mirra. F...
Sales of MP cylinder Assy for CMP equipment. Standard repair or repair service by special parts replacement is also available. Compatible with P/N: 0750-111515. For IPEC776. For 8 inch/200mm.
Sale of pad conditioner Assy (with motor) for CMP equipment. Standard repair or repair service by special parts replacement is also available. Compatible with P/N: 0010-12344. For AMAT Mirra. For 8...
Sales of platen motor pulley bushing assemblies for CMP equipment. Standard repair or repair service by special parts replacement is also available. For AMAT Mirra. For 8 inch/200mm.
Sales of platen (lower/upper) assemblies for CMP equipment. Standard repair or repair service by special parts replacement is also available. Compatible with P/N: 0010-77293. For AMAT Mirra. For 8 ...
Sales of HCLU load cups for CMP equipment. Standard repair or repair service by special parts replacement is also available. Compatible with P/N: 0240-12272. For AMAT Mirra. For 8 inch/200mm.
Sales of head sweep motor assemblies for CMP equipment. Standard repair or repair service by special parts replacement is also available. Compatible with P/N: 0010-03697. For AMAT Mirra. For 8 inch...
Sales of 3-port (zone) rotary unions for CMP equipment polishing heads. Mainly compatible products for Dublin products. Standard repair or repair service by special parts replacement is also availa...
Sales of spindle assemblies for CMP equipment. Standard repair or repair service by special parts replacement is also available. Compatible with P/N: 0010-77216. For AMAT Mirra. For 8 inch/200mm.
Sales of wet robot Assy for CMP equipment. Standard repair or repair service by special parts replacement is also available. P/N: 0010-77676, 0010-77400 etc.
Sales of cross pedestal (harmonic drive) Assy for CMP equipment. Standard repair or repair service including replacement of new harmonic gear is also available. P/N: 0010-26153 (Old: 0010-77141). F...
One set of right side (0021-14649), left side (0021-14650) and center support slot (0021-14651) of wafer/wafer support cleaner HVM for CMP machine spindle shaft. Individual sales are also possible ...
A model for improving the service life and uniformity of retainer rings for CMP equipment. The material is X3G. Compatible with 8 inch (200mm) only. Compatible with AMAT Mirra, EBARA FREX/F-REX200...
Head for MASTERFLEX rotary pump for CMP equipment. A part that attaches to the head of a slurry motor (tube pump). Case material: PC (polycarbonate), rotor case material: SUS (stainless steel). P/...
Pad Conditioner Rotation Motor Gearbox/Gear Box. Compatible with CGI 017PLX0220-XX3959X. For AMAT Mirra CMP equipment. Repair/overhaul is also available.
