Sales of spindle assemblies for CMP equipment. Standard repair or repair service by special parts replacement is also available. Compatible with P/N: 0010-77216. For AMAT Mirra. For 8 inch/200mm.
Sales of wet robot Assy for CMP equipment. Standard repair or repair service by special parts replacement is also available. P/N: 0010-77676, 0010-77400 etc.
Sales of cross pedestal (harmonic drive) Assy for CMP equipment. Standard repair or repair service including replacement of new harmonic gear is also available. P/N: 0010-26153 (Old: 0010-77141). F...
One set of right side (0021-14649), left side (0021-14650) and center support slot (0021-14651) of wafer/wafer support cleaner HVM for CMP machine spindle shaft. Individual sales are also possible ...
A model for improving the service life and uniformity of retainer rings for CMP equipment. The material is X3G. Compatible with 8 inch (200mm) only. Compatible with AMAT Mirra, EBARA FREX/F-REX200...
Head for MASTERFLEX rotary pump for CMP equipment. A part that attaches to the head of a slurry motor (tube pump). Case material: PC (polycarbonate), rotor case material: SUS (stainless steel). P/...
Pad Conditioner Rotation Motor Gearbox/Gear Box. Compatible with CGI 017PLX0220-XX3959X. For AMAT Mirra CMP equipment. Repair/overhaul is also available.
Parts for brush tank for CMP cleaning equipment. Wafer/wafer/wafer brush roller assembly. Compatible parts such as genuine P/N: 0021-13858/0010-23807. For CMP cleaning equipment MESA. Repair/overha...
FURON (Huron) HPVM2-F44-NC 1 set of 2. Compatible with FURON NVX2-144NC (old model). For AMAT (Applied Materials) CMP equipment Mirra platen shower (pure water). Ready to use without modification.
Pad conditioner diamond/diamond disc holder. Gimbal Base, Snap-On Type, Pad Conditioner. Compatible with P/N: 0040-77317. For AMAT CMP equipment Mirra.
For AMAT (Applied Materials) CMP equipment Mirra. Analog I/O Board (AI/O Board). We will sell a new CPU board to be installed in the VME rack. Compatible with P/N: 0100-03497REV2/0100-03920/0100-20...
For AMAT (Applied Materials) CMP equipment Mirra. MEI Board. A new CPU board to be installed in the VME rack is sold. P/N: Compatible with 0660-01705/0190-14502 (Please inquire for model number).
Carrier head assembly for AMAT Mirra Oxide TITAN-1. For 3 zones (ports). Excludes retainer rings and membranes. Compatible with P/N: 0010-77196. 0010-77197 (Assy, Upper, 8"TITAN), 0010-77198 (Assy,...
Test platform for leak checking polishing prior to installation on equipment. For AMAT (Applied Materials) CMP equipment Mirra. 8 inch, 3, 4 zone only.
A motor + driver set that can replace (compatible) the NSK Megatorque Motor (RZ0810FN507/0190-14344) + Driver (EP0810AF3/AF5/AF8-05) which has been discontinued. For AMAT CMP equipment Mirra.
Modification kit for pad conditioner DDF3 (DDF-3) head. Diaphragm/diaphragmless design reduces leakage issues. cylinder type. Includes assembly instructions. For AMAT CMP equipment Mirra. P/N: BW41...
Replacement for the discontinued Wet Robot Shoulder Axis Motor (Shoulder Axis Motor P/N: 0190-77125). Our P/N: BW402L3R3. with encoder. 8" High Flex Cable specification. For AMAT CMP equipment M...
Replacement for the discontinued Wet Robot Wrist Axis Motor (Wrist Axis Motor P/N: 0190-16236). Our P/N: BW402L2R3. with encoder. 4.5" High Flex Cable specification. For AMAT CMP equipment Mirra.
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Retrofit kit compatible with the discontinued genuine Dual Channel Analog Pneumatics/Neutronics I/O Board (P/N: 0050-01091). Digital. For AMAT CMP equipment Mirra.
Upgraded model of QC gearbox for brush tank for cleaning equipment. Compatible with P/N: 0010-25969/0021-18493. It is possible to achieve performance such as gear detachment prevention, partial re...
Upgraded model of QC Wet Side for brush tank for cleaning equipment. Compatible with P/N: 0010-25969. Performance such as weight reduction, corrosion resistance, and smooth rotation can be realize...
Upgraded model of QC Dry Side for brush tank for cleaning equipment. Compatible with P/N: 0010-25970. Performance such as weight reduction, corrosion resistance, and smooth rotation can be achie...
