UPA Up-Grade Pressure Transducer

Upgrade model of UPA pressure transducer for CMP equipment. Available for all head zone pressures (RR, IT. PP, EC, UC). For AMAT Mirra. For 8 inch/200mm.

【Features】
1. Combining a pressure transducer with a pressure indicator, you can easily check the output pressure from your regulator and compare it with the value on the Mirra service screen. Easy to troubleshoot.

2. Works with all head zone pressures (RR, IT, PP, UC, EC). No need to keep two range type transducers in different zones.

3.) Ready to install without modification. The same is true for process connections. 1/8" NPT male connection.

【spec】
・Available for all head zone pressures (RR, IT, PP, EC, UC) ・Pressure range: -15 to +15 psi
・Range type: bi-directional with gauge ・Output signal: 0-10V (3-wire)
・Accuracy: 0.35%FS
・Electrical connection: DIN plug (0-10V 3-wire only)
・Process connection: 1/8 NPT male