POLOS μプリンター POLOS μPrinter

マスクレス露光(フォトリソグラフィー)を可能にするPOLOSマイクロプリンター。マイクロ構造、複製、スティッチングが可能なソフトフェアを搭載。研究開発(R&D)向け。

POLOS µPrinter Maskless photolithography equipment
SFTprint
SFTprint with 435nm light source 
Machine control software allows for 
- microstructures fabrication, replication, and stitching 
- control of the fabrication process and alignment procedures 

User interface:
- PC board
- 8Go RAM DDR4 and Intel Core i3 CPU
- 250Go SSD
- Microsoft Windows 10 Pro 64bit
- 24" screen full HD (1920x1080)
keyboard (QWERTY / AZERTY) and mouse

Features:
- 10X objective 
with magnetic "quick-release" system field-of-view = 1.35 mm x 0.75 mm; resolution < 2 μm 
- Motorized Z stage 
13 mm travel range with 0.6 μm precision 
- Motorized XY stage 
75 x 75 mm travel range with 0.31 μm precision and 2 μm repeatability Dedicated to stitching, step-and-repeat, automatic dose tests and alignment 
- Manual rotation stage 
360° rotation with 0.1° precision
- Multipurpose flat holder
- Holder for Microscope glass slides
- Self-installation & remote support if needed