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Repair and overhaul (O/H, OH) of vacuum pumps (cryo, turbo, dry, rotary, etc.) for semiconductor manufacturing equipment. For sputtering (PVD), CVD, etching, and ion implantation (IMP). Helix: CT-8/10, 100/250F, OB-8/10, ULVAC: U series, Canon Anellva CUP series, EBARA, BOC EDWARDS, etc.
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