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A cleaning sheet for recycling chuck cleaning wafers (CCW). 3 types of lineup for 4, 5, 6, 8, 12 inch CCW (7, 9, 13 inch square). Dedicated CCW for ETCH (etching) / sputtering (PVD).
RNP-PRF-1255(PRF-1255-BL), RNP-PRF-1038(PRF-1038-BL), RNP-PRF-1593(PRF-1593-BL), RNP-PRF-1138(PRF-1138-BL) )
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