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Model 800E: Semi-Automatic Double Sided Mask Aligner R&D/Low Volume Production

Vendor 協同インターナショナル

Double-sided mask aligner (adhesion/proximity/contact exposure) system. optical. Alignment of top or bottom surface is possible. Semi-automatic/semi-automatic. For research and development (R&D). For small volume production. Made by OAI.

For more information is here

model 800E
Substrate size Up to 8 inch square
Mask size Up to 9 inch square
Alignment stage control XY movement: ±5mm
Rotation: ±4°
Alignment accuracy Single side: 0.5 to 1 µm
Both sides: <2µm (3σ)
Exposure time 1s-3200s (0.1s intervals)
Exposure Mode: Resolution Proximity: 3-5μm (15-20μm gap)
Soft contact: 2µm
Hard contact: 1µm
Vacuum contact : sub-µm
throughput -
Incidental equipment Power supply: 220V
Vacuum line, air line or N2 line, exhaust line
size 1810mmH x 1270mmW x 912mmD
This is a pre order item. We will ship it when it comes in stock.