Model 800E: Semi-Automatic Double Sided Mask Aligner R&D/Low Volume Production

Name: Model 800E: Semi-Automatic Double Sided Mask Aligner R&D/Low Volume Production
Brand: 協同インターナショナル
Availability: OutOfStock

協同インターナショナル

ASK

Double-sided mask aligner (adhesion/proximity/contact exposure) system. optical. Alignment of top or bottom surface is possible. Semi-automatic/semi-automatic. For research and development (R&D). For small volume production. Made by OAI.

For more information is here

model	800E
Substrate size	Up to 8 inch square
Mask size	Up to 9 inch square
Alignment stage control	XY movement: ±5mm Rotation: ±4°
Alignment accuracy	Single side: 0.5 to 1 µm Both sides: <2µm (3σ)
Exposure time	1s-3200s (0.1s intervals)
Exposure Mode: Resolution	Proximity: 3-5μm (15-20μm gap) Soft contact: 2µm Hard contact: 1µm Vacuum contact : sub-µm
throughput	-
Incidental equipment	Power supply: 220V Vacuum line, air line or N2 line, exhaust line
size	1810mmH x 1270mmW x 912mmD

Quantity must be 1 or more