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Model 6020 Automatic mask aligner for large substrates for mass production

Vendor 協同インターナショナル

Single-sided mask aligner (adhesion/proximity/contact exposure) system. optical. Fully automatic/fully automatic. For liquid crystal/FPD/LCD/flat panel displays and medium mass production. Large substrates (up to 20″×20″). All-computer control. Made by OAI.

For more information is here

model 6020
Substrate size 12" square – up to 20" square
Mask size 14" square – up to 24" square
Alignment stage control Z motion: 1500µm
Alignment accuracy One side: 0.5 μm
Both sides: 1 μm
Exposure time 1s-999s (0.1s interval)
Exposure Mode: Resolution Proximity: 5μm
Soft contact: 3-5μm
Hard contact: 2-3 μm
Vacuum contact: <2μm
throughput -
Incidental equipment Power supply : 400V or 208V, 3P5 wire vacuum line, air line or N2 line, exhaust line
size 71530mmH x 76825mmW x 36290mmD
This is a pre order item. We will ship it when it comes in stock.