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Model 212 Manual single-sided tabletop large-area mask aligner for R&D

Vendor 協同インターナショナル

Single-sided mask aligner (adhesion/proximity/contact exposure) system. Benchtop type, compact and easy to install. Manual type. For research and development (R&D). reasonable. For medium-sized boards up to 12 inches. Made by OAI.

For more information is here

model 212
Substrate size up to 12 inch square
Mask size up to 14 inch square
Alignment stage control XY movement: ±10mm
Z movement: 5mm
Rotation: ±3.5°
Alignment accuracy -
Exposure time 0.1s to 99.0s (0.1s interval) or 1s to 999s (1s interval)
Exposure Mode: Resolution Proximity: 5µm (20µm gap)
Soft contact: 2µm
Hard contact: 1µm
Vacuum contact : sub-µm
throughput -
Incidental equipment Power supply: 110V or 220V (depending on specification)
Vacuum line, air line or N2 line, exhaust line
size 1067mmH x 1524mmW x 1346mmD
This is a pre order item. We will ship it when it comes in stock.