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Head for MASTERFLEX rotary pump for CMP equipment. A part that attaches to the head of a slurry motor (tube pump). Case material: PC (polycarbonate), rotor case material: SUS (stainless steel). P/N: 7017-21 (65S). For AMAT Mirra. For 8 inch/200mm.
*Sold as a set of 3. Separate price for single item.
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