Repair/refurbishment/overhaul of HCLU load cups for CMP equipment. Full OH including cleaning, coat stripping, center shaft and other major parts replacement. Black stick coating has the effect of preventing slurry sticking. P/N: 0240-31390, 0010-77157. For AMAT Mirra 8" (200mm). Optional centering jaw (P/N: 0020-78932) and Delrin fork replacement are also available.
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HCLU 200MM REFURBISHMENT, REQUIRES CORE FROM CUSTOMER
SERVICE INCLUDES:
COMPLETE UNIT DISASSEMBLY AND CLEANING -- ALL COMPONENTS
REPLACEMENT OF ALL HARDWARE
LINEAR BEARING CLEANED & REGREASED
UNIT LEAK TEST -- INTERNAL 24 HOURS & EXTERNAL 24 HOURS AIR CYLINDER OPERATIONAL TEST
SENSOR FUNCTIONALITY TEST – 4000 CYCLE TEST
PACKAGES WITH CUSTOM FOAM INSERT INCLUDES C OF C ON CLEANROOM PAPER
REPLACED ON REBUILD:
NEW COATING OF HCLU MAIN COMPONENTS
Centering Jaw Bearings (18)
CENTERING JAW AIR CYLINDERS (3)
Centering Jaw Seals (3)
PEDESTAL UP AIR CYLINDERS (3)
CUP UP AIR CYLINDER (1)
ALIGNMENT COUPLERS (3)
CUP ALIGNMENT COUPLER (1)
PEDESTAL SHAFT BUSHINGS (2)
PEDESTAL SHAFT SEALS (2)
PEDESTAL SHAFT
BELLOWS
CUP COVER
TUBING (ALL)
SENSORS ARRAY
ALL O-RINGS (18)
ALL HARDWARE
DOES NOT INCLUDE NEW PPS CENTERING JAWS OR FORKS – MAJOR DAMAGED NON-CONSUMABLE PARTS WILL BE QUOTED SEPARATELY
