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Upgrade model of CVG assembly. A design that removes the ceramic resistor and quartz tube. Compatible with 0021-23550/0021-10296/0020-09602/0020-10134/0040-05294/0040-02938. For AMAT ENDURA, P5000, Centura. Input Block, Output Block/DLH SACVD CVG/DLH SiN/PECVD CVG/TxZ HP+ CVG.
[Features]
A design that eliminates the source of all imperfections by removing the ceramic resistor and quartz tube.
・The reassembly time has been greatly reduced, and the initial assembly success rate has also been improved.
・The PM time can be shortened, contributing to the reduction of equipment downtime.
【Compatible models】
OEM Reference P/N
Chamber Type
Input Block
Output Block
DLH SACVD CVG
0021-23550
0021-10296
DLH SiN PECVD CVG
0020-09602
0020-10134
TxZ HP+ CVG
0040-05294
0040-02938
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