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Load image into Gallery viewer, AMAT CVG Assembly Upgrade External Resistor Upgrade for Legacy tools
Load image into Gallery viewer, AMAT CVG Assembly Upgrade External Resistor Upgrade for Legacy tools
Load image into Gallery viewer, AMAT CVG Assembly Upgrade External Resistor Upgrade for Legacy tools
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AMAT CVG Assembly Upgrade External Resistor Upgrade for Legacy tools

Vendor 協同インターナショナル
Regular price ¥620,000
Sale price ¥620,000 Regular price
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Upgrade model of CVG assembly. A design that removes the ceramic resistor and quartz tube. Compatible with 0021-23550/0021-10296/0020-09602/0020-10134/0040-05294/0040-02938. For AMAT ENDURA, P5000, Centura. Input Block, Output Block/DLH SACVD CVG/DLH SiN/PECVD CVG/TxZ HP+ CVG.

[Features]

A design that eliminates the source of all imperfections by removing the ceramic resistor and quartz tube.

・The reassembly time has been greatly reduced, and the initial assembly success rate has also been improved.

The PM time can be shortened, contributing to the reduction of equipment downtime.

【Compatible models】

OEM Reference P/N

Chamber Type

Input Block

Output Block

DLH SACVD CVG

0021-23550

0021-10296

DLH SiN PECVD CVG

0020-09602

0020-10134

TxZ HP+ CVG

0040-05294

0040-02938

This is a pre order item. We will ship it when it comes in stock.