METALS equipment name medium size machine large machine 41CP/42CP/43TMP 81CP/82CP/83TMP/84TMP Au ◯ ◯ Al ◯ ◯ Ag ◯ ◯ B. ◯ - C. ◯ ◯ Co ◯ ◯ Cr ◯ ◯ Cu ◯ ◯ Fe ◯ ◯ Ge ◯ ◯ Hf ◯ - In ◯ - IR ◯ - Mg ◯ - Mn ◯ - Mo ◯ ◯ Nb ◯ - Ni ◯ ◯ Pd ◯ - Pt ◯ ◯ Rh ◯ - Ru ◯ - Si (N-type) (1 to 50Ω cm) ◯ ◯ Si (P-type) (1 to 50Ω cm) ◯ ◯ Si (N type) (high resistance) (1000Ω cm or more) ◯ - Si (N type) (high resistance) (5000Ω cm or more) ◯ - Sn ◯ - Ta ◯ ◯ Ti ◯ ◯ V. ◯ - W. ◯ ◯ Y ◯ - Zn ◯ - Zr ◯ - SILICIDES equipment name medium size machine large machine 41CP/42CP/43TMP 81CP/82CP/83TMP/84TMP CoSi2 ◯ ◯ MoSi 2.5 ◯ - NiSi2 ◯ - TaSi2 ◯ - TiSi2 ◯ ◯ WSi 2 ◯ ◯ WSi 2.5 ◯ - ZrSi2 ◯ - NITRIDES equipment name medium size machine large machine 41CP/42CP/43TMP 81CP/82CP/83TMP/84TMP AlN ◯ - BN ◯ - Mo2N ◯ - Si3N4 _ ◯ ◯ ZrN ◯ - CARBIDES equipment name medium size machine large machine 41CP/42CP/43TMP 81CP/82CP/83TMP/84TMP SiC ◯ ◯ TiC - ◯ ALLOYS equipment name medium size machine large machine 41DP/42CP/43TMP 81CP/82CP/83TMP/84TMP Al-Cu ◯ ◯ 99.5: 0.5wt% Al-Nd ◯ - 98:2at% Al-Sc ◯ - 99.9: 0.1wt% Al-Si ◯ ◯ 99:1wt% Al-Si-Cu ◯ ◯ 98.5:1:0.5wt% Al-Ti ◯ - 99.5: 0.5wt% Au-Sn ◯ - 70:30wt% Cu-Ni - - 96:4wt% Co-Cr ◯ - 85:15wt% Fe-Co ◯ - 70:30at% Ni-Cr ◯ ◯ 80:20wt% Ni-Fe ◯ - 80:20wt% Ni-V - ◯ 93:7wt% TiW ◯ ◯ 10:90wt% OXIDES equipment name medium size machine large machine 41CP/42CP/43TMP 81CP/82CP/83TMP/84TMP Al2O3 _ ◯ ◯ AZO ◯ - 3: 97wt% BaTiO3 ◯ - CeO2 ◯ ◯ CuO ◯ ◯ Fe2O3 _ ◯ - Ga2O3 _ ◯ - Gd2O3 _ ◯ - HfO2 ◯ ◯ In2O3 _ ◯ - ITO ◯ ◯ 90:10wt% IZO ◯ ◯ 89.3: 10.7wt% LiCoO2 ◯ - LiMn2O4 _ ◯ - LiNbO3 ◯ - Li3PO4 _ ◯ - MgO ◯ - Mn2O3 _ ◯ - Nb2O5 _ ◯ - NiO ◯ - PZT ◯ ◯ Pb(Zr0.52Ti0.48) O3 RuO2 ◯ - SiO ◯ - SiO2 ◯ ◯ SnO ◯ - SnO2 ◯ - SrRuO3 ◯ - SrTiO3 ◯ - Ta2O5 _ ◯ ◯ TiO2 ◯ ◯ WO3 ◯ - Y2O3 _ ◯ - ZnO ◯ ◯ ZrO2 : Y2O3 ◯ - YSZ (97:3mol%) stabilized zirconia These targets are also available. METALS Bi SILICIDES CrSi2 3: 97wt% WSi 0.4 NITRIDES Cr2N CARBIDES WC ALLOYS Cu-Cr 92:8wt% Cu-Cr 94:6wt% Cu-Cr 96:4wt% Cu-Ni 94:6wt% Co-Ni 80:20wt% Ni-Cr-Si 40:40:20wt% Ni-Cr-Si 45:45:10wt% OXIDES CaCO3 CrSiO 40:60at% TaSiO2 20:80at% TaSiO2 30:70at% TaSiO2 40:60at% TaSiO2 45:55at% Ta- SiO2 -Ni 65.7:32.7:1.6at% OTHERS BK7 Teflon CaF CaF2 MgF2
