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A cleaning sheet for recycling chuck cleaning wafers (CCW). 3 types of lineup for 4, 5, 6, 8, 12 inch CCW (7, 9, 13 inch square). Exclusively for CCW for photolithography/exposure. RNC-DRF-1255(...

Resin vacuum table 2 layers 12, 8, 6, 5, 4 inches, dedicated type for each inch

from ¥200,000

Resin vacuum table 2-layer type. Dedicated jig for 4, 5, 6, 8, 12 inch chuck cleaning wafers (CCW). Used to fix CCW when playing CCW. Since it is made of resin, the risk of scratches and particle ...

Resin vacuum table 3 layers 12, 8, 6, 5, 4 inch plate replaceable type

from ¥310,000

Resin vacuum table 3-layer type. Multipurpose jig for 4, 5, 6, 8, 12 inch chuck cleaning wafers (CCW). Used to fix CCW when playing CCW. Since it is made of resin, the risk of scratches and partic...

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Vacuum Pump for polymer vacuum plate for CCW recycle

¥90,000

Vacuum pump manufactured by Nitto Kohki. P/N: VP0940. Dedicated pump for vacuum table used when regenerating chuck cleaning wafer (CCW). Ultimate vacuum pressure: -53.3kPa, Discharge air volume:...

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¥7,000

A resin roller used when recycling chuck cleaning wafers (CCW). A part for pressing the Particle Removal Film (PRF) against the CCW that has been adsorbed on the vacuum table while expelling air b...

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窒化アルミニウム（AlN）単結晶の製品を提供します。ご希望の仕様についても対応可能ですので、お気軽にお問い合わせください。

from ¥132,600

納期：受注後約2週間 ※納期につきましては、枚数やご注文タイミングなどの詳細がわかればもう少し早くに調整することも可能です。 ※表示価格は当方標準条件での成膜の場合となります。　1枚からでも加工対応は可能ですが、その場合はセットアップ費用分を別料金で頂くため、価格が大きく変わってきます。ご注意ください。