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equipment parts

202 products
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Regular price ¥170,000
Sale price ¥170,000
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Replacement for the discontinued Wet Robot Wrist Axis Motor (Wrist Axis Motor P/N: 0190-16236). Our P/N: BW402L2R3. with encoder. 4.5" High Flex Cable specification. For AMAT CMP equipment Mirra. ...
Regular price ¥170,000
Sale price ¥170,000
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Wet Robot Z Axis Motor (Discontinued/Discontinued). P/N: 0190-17944 (our company's P/N: BW402L1L4) 13" High Flex Cable specification, P/N: 0190-16234 (our company's BW402L1R5) 15 pin specificati...
Regular price from ¥220,000
Sale price from ¥220,000
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Dedicated probe for UV illuminance meter (Power Meter) Model 308 (365nm, 400nm, 420nm, 436nm, etc.). The successor model of the old model 306 manufactured by OAI. Calibration service is also availa...
Regular price from ¥320,000
Sale price from ¥320,000
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Handy type UV illumination meter (Power Meter). The successor model of the old model 306 manufactured by OAI. Calibration service is also available. We also sell dedicated probes (365nm, 400nm, 420...
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Regular price ¥1,200,000
Sale price ¥1,200,000
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Retrofit kit compatible with the discontinued genuine Dual Channel Analog Pneumatics/Neutronics I/O Board (P/N: 0050-01091). Digital. For AMAT CMP equipment Mirra.
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Regular price ¥620,000
Sale price ¥620,000
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Upgrade model of CVG assembly. A design that removes the ceramic resistor and quartz tube. Compatible with 0021-23550/0021-10296/0020-09602/0020-10134/0040-05294/0040-02938. For AMAT ENDURA, P5000...
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Regular price ¥90,000
Sale price ¥90,000
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Vacuum pump manufactured by Nitto Kohki. P/N: VP0940. Dedicated pump for vacuum table used when regenerating chuck cleaning wafer (CCW). Ultimate vacuum pressure: -53.3kPa, Discharge air volume:...
Regular price from ¥200,000
Sale price from ¥200,000
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Resin vacuum table 2-layer type. Dedicated jig for 4, 5, 6, 8, 12 inch chuck cleaning wafers (CCW). Used to fix CCW when playing CCW. Since it is made of resin, the risk of scratches and particle ...
Regular price from ¥310,000
Sale price from ¥310,000
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Resin vacuum table 3-layer type. Multipurpose jig for 4, 5, 6, 8, 12 inch chuck cleaning wafers (CCW). Used to fix CCW when playing CCW. Since it is made of resin, the risk of scratches and partic...
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Cleaning wafer to remove dirt/dust/particles on vacuum/vacuum/electrostatic/mechanical/pin chuck. Effective in reducing dummy wafer/wafer/wafer/wafer/wafer/wafer loss, reducing equipment downtime, ...
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A cleaning sheet for recycling chuck cleaning wafers (CCW). 3 types of lineup for 4, 5, 6, 8, 12 inch CCW (7, 9, 13 inch square). Exclusively for CCW for photolithography/exposure. RNC-DRF-1255(...
Regular price from ¥29,000
Sale price from ¥29,000
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A cleaning sheet for recycling chuck cleaning wafers (CCW). 3 types of lineup for 4, 5, 6, 8, 12 inch CCW (7, 9, 13 inch square). Dedicated CCW for ETCH (etching) / sputtering (PVD). RNP-PRF-125...
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Cleaning wafer to remove dirt/dust/particles on vacuum/vacuum/electrostatic/mechanical/pin chuck. Effective in reducing dummy wafer/wafer/wafer/wafer/wafer/wafer loss, reducing equipment downtime, ...
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Cleaning wafer to remove dirt/dust/particles on vacuum/vacuum/electrostatic/mechanical/pin chuck. Effective in reducing dummy wafer/wafer/wafer/wafer/wafer/wafer loss, reducing equipment downtime, ...
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Cleaning wafer to remove dirt/dust/particles on vacuum/vacuum/electrostatic/mechanical/pin chuck. Effective in reducing dummy wafer/wafer/wafer/wafer/wafer/wafer loss, reducing equipment downtime,...
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Cleaning wafer to remove dirt/dust/particles on vacuum/vacuum/electrostatic/mechanical/pin chuck. Effective in reducing dummy wafer/wafer/wafer/wafer/wafer/wafer loss, reducing equipment downtime, ...
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Cleaning wafer to remove dirt/dust/particles on vacuum/vacuum/electrostatic/mechanical/pin chuck. Effective in reducing dummy wafer/wafer/wafer/wafer/wafer/wafer loss, reducing equipment downtime,...
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Upgrade model of electrostatic chuck (E chuck/ESC) for ion implantation (IMP) equipment E220/E500/EHP220/EHP500/VIISion/VIISta. Problems of the original product have been improved in terms of funct...
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Regular price ¥1,080,000
Sale price ¥1,080,000
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TXZ Heater for CVD equipment. Compatible with P/N: 0010-37784. For AMAT CVD equipment Centura TXZ chamber. The shape and model number may differ from the photo (inquire each time).
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Regular price ¥910,000
Sale price ¥910,000
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Upgraded model of QC gearbox for brush tank for cleaning equipment. Compatible with P/N: 0010-25969/0021-18493. It is possible to achieve performance such as gear detachment prevention, partial re...
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Regular price ¥1,320,000
Sale price ¥1,320,000
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Upgraded model of QC Wet Side for brush tank for cleaning equipment. Compatible with P/N: 0010-25969. Performance such as weight reduction, corrosion resistance, and smooth rotation can be realize...
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Regular price ¥1,320,000
Sale price ¥1,320,000
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Upgraded model of QC Dry Side for brush tank for cleaning equipment. Compatible with P/N: 0010-25970. Performance such as weight reduction, corrosion resistance, and smooth rotation can be achie...
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Regular price ¥40,000
Sale price ¥40,000
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Flexure Flexure. Compatible with P/N: 0040-77343. For AMAT (Applied Materials) CMP equipment Mirra. Parts for Polishing Head. Sold in 1 lot of 3 pieces. Made of SUS. Our P/N: SA18-0085-00. *Mi...
Regular price from ¥300,000
Sale price from ¥300,000
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CMP equipment improved cross cover (slurry adhesion prevention model). Compatible with P/N: 0020-79378. An upgraded product that prevents slurry from adhering and improves contamination/particle p...