Collection:
equipment parts
200 products
Model 308/308T UV Illumination Meter Model 308/308T Light Meter
Regular price
from ¥320,000
Sale price
from ¥320,000
Regular price
Unit price
/per
Handy type UV illumination meter (Power Meter). The successor model of the old model 306 manufactured by OAI. Calibration service is also available. We also sell dedicated probes (365nm, 400nm, 420...
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Analog Pneumatics Board Up-grade ASSY
Regular price
¥1,200,000
Sale price
¥1,200,000
Regular price
Unit price
/per
Retrofit kit compatible with the discontinued genuine Dual Channel Analog Pneumatics/Neutronics I/O Board (P/N: 0050-01091). Digital. For AMAT CMP equipment Mirra.
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AMAT CVG Assembly Upgrade External Resistor Upgrade for Legacy tools
Regular price
¥620,000
Sale price
¥620,000
Regular price
Unit price
/per
Upgrade model of CVG assembly. A design that removes the ceramic resistor and quartz tube. Compatible with 0021-23550/0021-10296/0020-09602/0020-10134/0040-05294/0040-02938. For AMAT ENDURA, P5000...
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Vacuum Pump for polymer vacuum plate for CCW recycle
Regular price
¥90,000
Sale price
¥90,000
Regular price
Unit price
/per
Vacuum pump manufactured by Nitto Kohki. P/N: VP0940. Dedicated pump for vacuum table used when regenerating chuck cleaning wafer (CCW). Ultimate vacuum pressure: -53.3kPa, Discharge air volume:...
Resin vacuum table 2 layers 12, 8, 6, 5, 4 inches, dedicated type for each inch
Regular price
from ¥200,000
Sale price
from ¥200,000
Regular price
Unit price
/per
Resin vacuum table 2-layer type. Dedicated jig for 4, 5, 6, 8, 12 inch chuck cleaning wafers (CCW). Used to fix CCW when playing CCW. Since it is made of resin, the risk of scratches and particle ...
Resin vacuum table 3 layers 12, 8, 6, 5, 4 inch plate replaceable type
Regular price
from ¥310,000
Sale price
from ¥310,000
Regular price
Unit price
/per
Resin vacuum table 3-layer type. Multipurpose jig for 4, 5, 6, 8, 12 inch chuck cleaning wafers (CCW). Used to fix CCW when playing CCW. Since it is made of resin, the risk of scratches and partic...
Chuck Cleaning Wafer for Glass Mask 6025
ASK
Cleaning wafer to remove dirt/dust/particles on vacuum/vacuum/electrostatic/mechanical/pin chuck. Effective in reducing dummy wafer/wafer/wafer/wafer/wafer/wafer loss, reducing equipment downtime, ...
Defect Removal Film (DRF)
ASK
A cleaning sheet for recycling chuck cleaning wafers (CCW). 3 types of lineup for 4, 5, 6, 8, 12 inch CCW (7, 9, 13 inch square). Exclusively for CCW for photolithography/exposure.
RNC-DRF-1255(...
Particle Removal Film (PRF)
Regular price
from ¥29,000
Sale price
from ¥29,000
Regular price
¥0
Unit price
/per
A cleaning sheet for recycling chuck cleaning wafers (CCW). 3 types of lineup for 4, 5, 6, 8, 12 inch CCW (7, 9, 13 inch square). Dedicated CCW for ETCH (etching) / sputtering (PVD).
RNP-PRF-125...
Chuck Cleaning Wafer 12 inch
ASK
Cleaning wafer to remove dirt/dust/particles on vacuum/vacuum/electrostatic/mechanical/pin chuck. Effective in reducing dummy wafer/wafer/wafer/wafer/wafer/wafer loss, reducing equipment downtime, ...
Chuck Cleaning Wafer 8 inch
Regular price
¥172,000
Sale price
¥172,000
Regular price
Unit price
/per
Cleaning wafer to remove dirt/dust/particles on vacuum/vacuum/electrostatic/mechanical/pin chuck. Effective in reducing dummy wafer/wafer/wafer/wafer/wafer/wafer loss, reducing equipment downtime, ...
Chuck Cleaning Wafer 6 inch
ASK
Cleaning wafer to remove dirt/dust/particles on vacuum/vacuum/electrostatic/mechanical/pin chuck. Effective in reducing dummy wafer/wafer/wafer/wafer/wafer/wafer loss, reducing equipment downtime,...
Chuck Cleaning Wafer 5 inch
ASK
Cleaning wafer to remove dirt/dust/particles on vacuum/vacuum/electrostatic/mechanical/pin chuck. Effective in reducing dummy wafer/wafer/wafer/wafer/wafer/wafer loss, reducing equipment downtime, ...
Chuck Cleaning Wafer 4 inch
Regular price
¥79,000
Sale price
¥79,000
Regular price
Unit price
/per
Cleaning wafer to remove dirt/dust/particles on vacuum/vacuum/electrostatic/mechanical/pin chuck. Effective in reducing dummy wafer/wafer/wafer/wafer/wafer/wafer loss, reducing equipment downtime,...
ESC upgrade model for E220/E550/EHP220/EHP500/VIISion/VIISta
ASK
Upgrade model of electrostatic chuck (E chuck/ESC) for ion implantation (IMP) equipment E220/E500/EHP220/EHP500/VIISion/VIISta. Problems of the original product have been improved in terms of funct...
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TXZ Heater 0010-37784 TXZ Heater
Regular price
¥1,080,000
Sale price
¥1,080,000
Regular price
Unit price
/per
TXZ Heater for CVD equipment. Compatible with P/N: 0010-37784. For AMAT CVD equipment Centura TXZ chamber. The shape and model number may differ from the photo (inquire each time).
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QC Gear Box Upgrade model 0010-25969/0021-18493
Regular price
¥910,000
Sale price
¥910,000
Regular price
Unit price
/per
Upgraded model of QC gearbox for brush tank for cleaning equipment. Compatible with P/N: 0010-25969/0021-18493. It is possible to achieve performance such as gear detachment prevention, partial re...
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QC Wetside Assy Upgrade model 0010-25969 QC Wetside Assy Upgrade model
Regular price
¥1,320,000
Sale price
¥1,320,000
Regular price
Unit price
/per
Upgraded model of QC Wet Side for brush tank for cleaning equipment. Compatible with P/N: 0010-25969. Performance such as weight reduction, corrosion resistance, and smooth rotation can be realize...
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QC Dryside Assy Upgrade model 0010-25970 QC Dryside Assy Upgrade model
Regular price
¥1,320,000
Sale price
¥1,320,000
Regular price
Unit price
/per
Upgraded model of QC Dry Side for brush tank for cleaning equipment. Compatible with P/N: 0010-25970. Performance such as weight reduction, corrosion resistance, and smooth rotation can be achie...
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Flexure Flexure 0040-77343
Regular price
¥40,000
Sale price
¥40,000
Regular price
Unit price
/per
Flexure Flexure. Compatible with P/N: 0040-77343. For AMAT (Applied Materials) CMP equipment Mirra. Parts for Polishing Head. Sold in 1 lot of 3 pieces. Made of SUS. Our P/N: SA18-0085-00.
*Mi...
Modified Cross Cover (Anti-slurry model) 0020-79378
Regular price
from ¥300,000
Sale price
from ¥300,000
Regular price
Unit price
/per
CMP equipment improved cross cover (slurry adhesion prevention model). Compatible with P/N: 0020-79378. An upgraded product that prevents slurry from adhering and improves contamination/particle p...
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Slurry Arm 0010-77651 etc.
Regular price
¥1,010,000
Sale price
¥1,010,000
Regular price
Unit price
/per
Slurry Arm for CMP equipment. Compatible with genuine P/N: 0010-77651. The shape and model number may differ from the photo (inquire each time). Lineup for AMAT Mirra/Reflexion.
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Running Beam Running Beam 0020-84290
Regular price
¥1,960,000
Sale price
¥1,960,000
Regular price
Unit price
/per
Parts for AMAT CMP equipment Reflexion LK.
The shape and model number may differ from the photo, so please contact us each time.
Mega Roller Mega Roller
Regular price
¥220,000
Sale price
¥220,000
Regular price
Unit price
/per
Mega Roller for cleaning equipment. Genuine P/N: Compatible products such as 0040-43238/0040-87416/0040-87418. The shape and model number may differ from the photo (inquire each time). Lineup for A...
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