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equipment parts

192 products
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Cleaning wafer to remove dirt/dust/particles on vacuum/vacuum/electrostatic/mechanical/pin chuck. Effective in reducing dummy wafer/wafer/wafer/wafer/wafer/wafer loss, reducing equipment downtime, ...
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A cleaning sheet for recycling chuck cleaning wafers (CCW). 3 types of lineup for 4, 5, 6, 8, 12 inch CCW (7, 9, 13 inch square). Exclusively for CCW for photolithography/exposure. RNC-DRF-1255(...
Regular price from ¥29,000
Sale price from ¥29,000
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A cleaning sheet for recycling chuck cleaning wafers (CCW). 3 types of lineup for 4, 5, 6, 8, 12 inch CCW (7, 9, 13 inch square). Dedicated CCW for ETCH (etching) / sputtering (PVD). RNP-PRF-125...
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Cleaning wafer to remove dirt/dust/particles on vacuum/vacuum/electrostatic/mechanical/pin chuck. Effective in reducing dummy wafer/wafer/wafer/wafer/wafer/wafer loss, reducing equipment downtime, ...
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ASK
Cleaning wafer to remove dirt/dust/particles on vacuum/vacuum/electrostatic/mechanical/pin chuck. Effective in reducing dummy wafer/wafer/wafer/wafer/wafer/wafer loss, reducing equipment downtime, ...
ASK
Cleaning wafer to remove dirt/dust/particles on vacuum/vacuum/electrostatic/mechanical/pin chuck. Effective in reducing dummy wafer/wafer/wafer/wafer/wafer/wafer loss, reducing equipment downtime,...
ASK
Cleaning wafer to remove dirt/dust/particles on vacuum/vacuum/electrostatic/mechanical/pin chuck. Effective in reducing dummy wafer/wafer/wafer/wafer/wafer/wafer loss, reducing equipment downtime, ...
Regular price from ¥0
Sale price from ¥0
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Unit price
per 
Cleaning wafer to remove dirt/dust/particles on vacuum/vacuum/electrostatic/mechanical/pin chuck. Effective in reducing dummy wafer/wafer/wafer/wafer/wafer/wafer loss, reducing equipment downtime,...
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Regular price ¥1,080,000
Sale price ¥1,080,000
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TXZ Heater for CVD equipment. Compatible with P/N: 0010-37784. For AMAT CVD equipment Centura TXZ chamber. The shape and model number may differ from the photo (inquire each time).
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Regular price ¥910,000
Sale price ¥910,000
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Upgraded model of QC gearbox for brush tank for cleaning equipment. Compatible with P/N: 0010-25969/0021-18493. It is possible to achieve performance such as gear detachment prevention, partial re...
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Regular price ¥1,320,000
Sale price ¥1,320,000
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Upgraded model of QC Wet Side for brush tank for cleaning equipment. Compatible with P/N: 0010-25969. Performance such as weight reduction, corrosion resistance, and smooth rotation can be realize...
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Regular price ¥1,320,000
Sale price ¥1,320,000
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Upgraded model of QC Dry Side for brush tank for cleaning equipment. Compatible with P/N: 0010-25970. Performance such as weight reduction, corrosion resistance, and smooth rotation can be achie...
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Regular price ¥40,000
Sale price ¥40,000
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Flexure Flexure. Compatible with P/N: 0040-77343. For AMAT (Applied Materials) CMP equipment Mirra. Parts for Polishing Head. Sold in 1 lot of 3 pieces. Made of SUS. Our P/N: SA18-0085-00. *Mi...
Regular price from ¥300,000
Sale price from ¥300,000
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CMP equipment improved cross cover (slurry adhesion prevention model). Compatible with P/N: 0020-79378. An upgraded product that prevents slurry from adhering and improves contamination/particle p...
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Regular price ¥1,010,000
Sale price ¥1,010,000
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Slurry Arm for CMP equipment. Compatible with genuine P/N: 0010-77651. The shape and model number may differ from the photo (inquire each time). Lineup for AMAT Mirra/Reflexion.
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Regular price ¥1,960,000
Sale price ¥1,960,000
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Parts for AMAT CMP equipment Reflexion LK. The shape and model number may differ from the photo, so please contact us each time.
Regular price ¥220,000
Sale price ¥220,000
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Mega Roller for cleaning equipment. Genuine P/N: Compatible products such as 0040-43238/0040-87416/0040-87418. The shape and model number may differ from the photo (inquire each time). Lineup for A...
Regular price ¥100,000
Sale price ¥100,000
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Mega idler for cleaning equipment. Compatible with genuine P/N: 0010-77582/0010-17014. The shape and model number may differ from the photo (inquire each time). Lineup for AMAT MESA.
Regular price from ¥132,000
Sale price from ¥132,000
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Conversion device/adapter for replacing floppy disks (FD/Floppy Disk) that are no longer manufactured/produced with USB. Compatible with ATAPI communication standard. Supports 34-pin connector, 2HD...
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A light pen used on a CRT monitor. AMAT CVD/Sputtering (PVD)/Ion Implantation (IMP)/Centura/Endura/Producer/P5000/PI9500 and Therma-Wave's film thickness measuring instrument (OP series) have a tra...
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A liquid crystal touch panel (LCD Monitor/Touch Panel) that can be replaced with a CRT monitor. 17 inch LCD monitor. AMAT CVD/PVD/Ion Implantation (IMP)/Centura/Endura/Producer/P5000/PI9500 and The...
Regular price ¥200,000
Sale price ¥200,000
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A conversion device/adapter for replacing floppy disks (FD/Floppy Disk) that are no longer manufactured/produced with Compact Flash (CF). Only for the SCSI communication standard. Mainly AMAT devic...
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RAID1 (mirroring) control unit designed with 3.5 inch HDD size. It is possible to convert SCSI/IDE communication standard hard disk data to SATA standard data and save it to a 2.5 inch SATA HD. St...
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Regular price ¥2,500,000
Sale price ¥2,500,000
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Handy type UV illuminance meter (power meter) with touch screen and built-in USB. The successor model of the old model 358 manufactured by OAI. Calibration service is also available. We also sell d...