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equipment parts

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Sales of A5 12-bit 16-channel (channel) card/board/PCB for ion implantation (implantation/IMP) equipment. For VIIsta 8 inch (200mm), 12 inch (300mm). For VARIAN/AMAT instruments.
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Sales of A4 16-bit 4-channel (channel) card/board/PCB for ion implantation (implantation/IMP) equipment. For VIIsta 8 inch (200mm), 12 inch (300mm). For VARIAN/AMAT instruments.
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Sales of A2/A3 4-axis interface/card/board/PCB for ion implantation (implantation/IMP) equipment. P/N: Compatible with E20000346. For VIIsta 8 inch (200mm), 12 inch (300mm). For VARIAN/AMAT instrum...
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Sales of A1 communication card/board/PCB for ion implantation (implantation/IMP) equipment. For VIIsta 8 inch (200mm), 12 inch (300mm). For VARIAN/AMAT instruments.
Regular price ¥3,600,000
Sale price ¥3,600,000
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Electrostatic chuck (ESC/E chuck) for etching equipment. For 12 inches (300mm). Compatible with P/N: 839-800327-390. For LAM/Flex 45. * The photo is an image of the ESC and is different from the ...
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Regular price ¥4,200,000
Sale price ¥4,200,000
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Electrostatic chuck (ESC/E chuck) for etching equipment. For 8 inch (200mm). Compatible with P/N: 0010-07946. For AMAT Centura E-MAX(EMAX). * The photo is an image of the ESC and is different fr...
Regular price from ¥840,000
Sale price from ¥840,000
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For 8 inch (200 mm) cover plate for CVD equipment. Compatible with P/N: 0200-36630, 0020-36631. For AMAT Centura DXZ chambers.
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Regular price ¥210,000
Sale price ¥210,000
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One set of right side (0021-14649), left side (0021-14650) and center support slot (0021-14651) of wafer/wafer support cleaner HVM for CMP machine spindle shaft. Individual sales are also possible ...
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A model for improving the service life and uniformity of retainer rings for CMP equipment. The material is X3G. Compatible with 8 inch (200mm) only. Compatible with AMAT Mirra, EBARA FREX/F-REX200...
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Regular price ¥87,000
Sale price ¥87,000
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Head for MASTERFLEX rotary pump for CMP equipment. A part that attaches to the head of a slurry motor (tube pump). Case material: PC (polycarbonate), rotor case material: SUS (stainless steel). P/...
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Regular price ¥400,000
Sale price ¥400,000
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Pad Conditioner Rotation Motor Gearbox/Gear Box. Compatible with CGI 017PLX0220-XX3959X. For AMAT Mirra CMP equipment. Repair/overhaul is also available.
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Regular price ¥1,200,000
Sale price ¥1,200,000
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Parts for brush tank for CMP cleaning equipment. Wafer/wafer/wafer brush roller assembly. Compatible parts such as genuine P/N: 0021-13858/0010-23807. For CMP cleaning equipment MESA. Repair/overha...
Regular price ¥232,000
Sale price ¥232,000
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FURON (Huron) HPVM2-F44-NC 1 set of 2. Compatible with FURON NVX2-144NC (old model). For AMAT (Applied Materials) CMP equipment Mirra platen shower (pure water). Ready to use without modification.
Regular price from ¥420,000
Sale price from ¥420,000
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Silicon (Si) focus ring for 4 inch (100mm) for etching equipment. Resistance value 1~30Ω.cm. Compatible with 1D10-350748-21. Minimum sales lot (MOQ) is 10 pieces.
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Regular price ¥110,000
Sale price ¥110,000
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Pad conditioner diamond/diamond disc holder. Gimbal Base, Snap-On Type, Pad Conditioner. Compatible with P/N: 0040-77317. For AMAT CMP equipment Mirra.
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Regular price ¥850,000
Sale price ¥850,000
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For AMAT (Applied Materials) CMP equipment Mirra. Analog I/O Board (AI/O Board). We will sell a new CPU board to be installed in the VME rack. Compatible with P/N: 0100-03497REV2/0100-03920/0100-20...
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Regular price ¥3,300,000
Sale price ¥3,300,000
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For AMAT (Applied Materials) CMP equipment Mirra. MEI Board. A new CPU board to be installed in the VME rack is sold. P/N: Compatible with 0660-01705/0190-14502 (Please inquire for model number).
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Regular price ¥7,000
Sale price ¥7,000
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A resin roller used when recycling chuck cleaning wafers (CCW). A part for pressing the Particle Removal Film (PRF) against the CCW that has been adsorbed on the vacuum table while expelling air b...
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Regular price ¥1,500,000
Sale price ¥1,500,000
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Carrier head assembly for AMAT Mirra Oxide TITAN-1. For 3 zones (ports). Excludes retainer rings and membranes. Compatible with P/N: 0010-77196. 0010-77197 (Assy, Upper, 8"TITAN), 0010-77198 (Assy,...
Regular price from ¥11,800,000
Sale price from ¥11,800,000
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Test platform for leak checking polishing prior to installation on equipment. For AMAT (Applied Materials) CMP equipment Mirra. 8 inch, 3, 4 zone only.
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Regular price ¥160,000
Sale price ¥160,000
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Upgrade type (substitute) compatible with OMRON wafer loss/wafer slipout sensor (with holder) E3S-BD11 (0090-77041). Prevent false slip-out detection. For AMAT (Applied Materials) CMP equipment Mirra.
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Regular price ¥4,000,000
Sale price ¥4,000,000
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A motor + driver set that can replace (compatible) the NSK Megatorque Motor (RZ0810FN507/0190-14344) + Driver (EP0810AF3/AF5/AF8-05) which has been discontinued. For AMAT CMP equipment Mirra.
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Regular price ¥220,000
Sale price ¥220,000
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Modification kit for pad conditioner DDF3 (DDF-3) head. Diaphragm/diaphragmless design reduces leakage issues. cylinder type. Includes assembly instructions. For AMAT CMP equipment Mirra. P/N: BW41...
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Regular price ¥170,000
Sale price ¥170,000
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Replacement for the discontinued Wet Robot Shoulder Axis Motor (Shoulder Axis Motor P/N: 0190-77125). Our P/N: BW402L3R3. with encoder. 8" High Flex Cable specification. For AMAT CMP equipment M...