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equipment parts

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Sales of A1 communication card/board/PCB for ion implantation (implantation/IMP) equipment. For VIIsta 8 inch (200mm), 12 inch (300mm). For VARIAN/AMAT instruments.
Regular price ¥3,600,000
Sale price ¥3,600,000
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Electrostatic chuck (ESC/E chuck) for etching equipment. For 12 inches (300mm). Compatible with P/N: 839-800327-390. For LAM/Flex 45. * The photo is an image of the ESC and is different from the ...
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Regular price ¥4,200,000
Sale price ¥4,200,000
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Electrostatic chuck (ESC/E chuck) for etching equipment. For 8 inch (200mm). Compatible with P/N: 0010-07946. For AMAT Centura E-MAX(EMAX). * The photo is an image of the ESC and is different fr...
Regular price from ¥840,000
Sale price from ¥840,000
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For 8 inch (200 mm) cover plate for CVD equipment. Compatible with P/N: 0200-36630, 0020-36631. For AMAT Centura DXZ chambers.
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Regular price ¥210,000
Sale price ¥210,000
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One set of right side (0021-14649), left side (0021-14650) and center support slot (0021-14651) of wafer/wafer support cleaner HVM for CMP machine spindle shaft. Individual sales are also possible ...
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A model for improving the service life and uniformity of retainer rings for CMP equipment. The material is X3G. Compatible with 8 inch (200mm) only. Compatible with AMAT Mirra, EBARA FREX/F-REX200...
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Regular price ¥87,000
Sale price ¥87,000
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Head for MASTERFLEX rotary pump for CMP equipment. A part that attaches to the head of a slurry motor (tube pump). Case material: PC (polycarbonate), rotor case material: SUS (stainless steel). P/...
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Regular price ¥400,000
Sale price ¥400,000
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Pad Conditioner Rotation Motor Gearbox/Gear Box. Compatible with CGI 017PLX0220-XX3959X. For AMAT Mirra CMP equipment. Repair/overhaul is also available.
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Regular price ¥1,200,000
Sale price ¥1,200,000
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Parts for brush tank for CMP cleaning equipment. Wafer/wafer/wafer brush roller assembly. Compatible parts such as genuine P/N: 0021-13858/0010-23807. For CMP cleaning equipment MESA. Repair/overha...
Regular price ¥232,000
Sale price ¥232,000
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FURON (Huron) HPVM2-F44-NC 1 set of 2. Compatible with FURON NVX2-144NC (old model). For AMAT (Applied Materials) CMP equipment Mirra platen shower (pure water). Ready to use without modification.
Regular price from ¥420,000
Sale price from ¥420,000
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Silicon (Si) focus ring for 4 inch (100mm) for etching equipment. Resistance value 1~30Ω.cm. Compatible with 1D10-350748-21. Minimum sales lot (MOQ) is 10 pieces.
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Regular price ¥110,000
Sale price ¥110,000
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Pad conditioner diamond/diamond disc holder. Gimbal Base, Snap-On Type, Pad Conditioner. Compatible with P/N: 0040-77317. For AMAT CMP equipment Mirra.
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Regular price ¥850,000
Sale price ¥850,000
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For AMAT (Applied Materials) CMP equipment Mirra. Analog I/O Board (AI/O Board). We will sell a new CPU board to be installed in the VME rack. Compatible with P/N: 0100-03497REV2/0100-03920/0100-20...
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Regular price ¥3,300,000
Sale price ¥3,300,000
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For AMAT (Applied Materials) CMP equipment Mirra. MEI Board. A new CPU board to be installed in the VME rack is sold. P/N: Compatible with 0660-01705/0190-14502 (Please inquire for model number).
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Regular price ¥7,000
Sale price ¥7,000
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A resin roller used when recycling chuck cleaning wafers (CCW). A part for pressing the Particle Removal Film (PRF) against the CCW that has been adsorbed on the vacuum table while expelling air b...
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Regular price ¥1,500,000
Sale price ¥1,500,000
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Carrier head assembly for AMAT Mirra Oxide TITAN-1. For 3 zones (ports). Excludes retainer rings and membranes. Compatible with P/N: 0010-77196. 0010-77197 (Assy, Upper, 8"TITAN), 0010-77198 (Assy,...
Regular price from ¥11,800,000
Sale price from ¥11,800,000
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Test platform for leak checking polishing prior to installation on equipment. For AMAT (Applied Materials) CMP equipment Mirra. 8 inch, 3, 4 zone only.
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Regular price ¥160,000
Sale price ¥160,000
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Upgrade type (substitute) compatible with OMRON wafer loss/wafer slipout sensor (with holder) E3S-BD11 (0090-77041). Prevent false slip-out detection. For AMAT (Applied Materials) CMP equipment Mirra.
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Regular price ¥4,000,000
Sale price ¥4,000,000
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A motor + driver set that can replace (compatible) the NSK Megatorque Motor (RZ0810FN507/0190-14344) + Driver (EP0810AF3/AF5/AF8-05) which has been discontinued. For AMAT CMP equipment Mirra.
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Regular price ¥220,000
Sale price ¥220,000
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Modification kit for pad conditioner DDF3 (DDF-3) head. Diaphragm/diaphragmless design reduces leakage issues. cylinder type. Includes assembly instructions. For AMAT CMP equipment Mirra. P/N: BW41...
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Regular price ¥170,000
Sale price ¥170,000
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Replacement for the discontinued Wet Robot Shoulder Axis Motor (Shoulder Axis Motor P/N: 0190-77125). Our P/N: BW402L3R3. with encoder. 8" High Flex Cable specification. For AMAT CMP equipment M...
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Regular price ¥170,000
Sale price ¥170,000
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Replacement for the discontinued Wet Robot Wrist Axis Motor (Wrist Axis Motor P/N: 0190-16236). Our P/N: BW402L2R3. with encoder. 4.5" High Flex Cable specification. For AMAT CMP equipment Mirra. ...
Regular price ¥170,000
Sale price ¥170,000
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Wet Robot Z Axis Motor (Discontinued/Discontinued). P/N: 0190-17944 (our company's P/N: BW402L1L4) 13" High Flex Cable specification, P/N: 0190-16234 (our company's BW402L1R5) 15 pin specificati...
Regular price from ¥220,000
Sale price from ¥220,000
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Dedicated probe for UV illuminance meter (Power Meter) Model 308 (365nm, 400nm, 420nm, 436nm, etc.). The successor model of the old model 306 manufactured by OAI. Calibration service is also availa...