Collection:
equipment parts
209 products
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Platen Motor Pulley and Bushing Assy Platen Motor Pulley and Bushing
ASK
Sales of platen motor pulley bushing assemblies for CMP equipment. Standard repair or repair service by special parts replacement is also available. For AMAT Mirra. For 8 inch/200mm.
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Lower Platen Assy And Upper Platen
ASK
Sales of platen (lower/upper) assemblies for CMP equipment. Standard repair or repair service by special parts replacement is also available. Compatible with P/N: 0010-77293. For AMAT Mirra. For 8 ...
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6inch HCLU PAD Plate and Pedestal Film
ASK
Sales of parts for HCLU load cups for CMP equipment. pad plate, pedestal film. For AMAT Mirra. For 8 inch/200mm.
HCLU Load Cup Assy
Regular price
from ¥4,600,000
Sale price
from ¥4,600,000
Regular price
Unit price
/per
Sales of HCLU load cups for CMP equipment. Standard repair or repair service by special parts replacement is also available. Compatible with P/N: 0240-12272. For AMAT Mirra. For 8 inch/200mm.
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Head Sweep Motor Assy Head Sweep Motor
Regular price
¥1,050,000
Sale price
¥1,050,000
Regular price
Unit price
/per
Sales of head sweep motor assemblies for CMP equipment. Standard repair or repair service by special parts replacement is also available. Compatible with P/N: 0010-03697. For AMAT Mirra. For 8 inch...
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3-Port Rotary Union
ASK
Sales of 3-port (zone) rotary unions for CMP equipment polishing heads. Mainly compatible products for Dublin products. Standard repair or repair service by special parts replacement is also availa...
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Spindle Assy Spindle
ASK
Sales of spindle assemblies for CMP equipment. Standard repair or repair service by special parts replacement is also available. Compatible with P/N: 0010-77216. For AMAT Mirra. For 8 inch/200mm.
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Wet Robot Assy Wet Robot
Regular price
¥5,250,000
Sale price
¥5,250,000
Regular price
Unit price
/per
Sales of wet robot Assy for CMP equipment. Standard repair or repair service by special parts replacement is also available. P/N: 0010-77676, 0010-77400 etc.
Cross Pedestal (Harmonic Drive)
ASK
Sales of cross pedestal (harmonic drive) Assy for CMP equipment. Standard repair or repair service including replacement of new harmonic gear is also available. P/N: 0010-26153 (Old: 0010-77141). F...
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Power Supply (Board, Card)
ASK
Sales of power supplies/cards/boards/PCB for ion implantation (implantation/IMP) equipment. P/N: Compatible with E21000124. For VIIsta 8 inch (200mm), 12 inch (300mm). For VARIAN/AMAT instruments.
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A6 24 Channel In-Out A6 24 Channel In-Out AD
ASK
Sales of A6 24 Channel In-Out Card/Board/PCB for Ion Implanter/IMP Equipment. For VIIsta 8 inch (200mm), 12 inch (300mm). For VARIAN/AMAT instruments.
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A5 12 Bit, 16 Channel AD A5 12 Bit, 16 Channel AD
ASK
Sales of A5 12-bit 16-channel (channel) card/board/PCB for ion implantation (implantation/IMP) equipment. For VIIsta 8 inch (200mm), 12 inch (300mm). For VARIAN/AMAT instruments.
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A4 16 bit, 4 Channel AD A4 16 bit, 4 Channel AD
ASK
Sales of A4 16-bit 4-channel (channel) card/board/PCB for ion implantation (implantation/IMP) equipment. For VIIsta 8 inch (200mm), 12 inch (300mm). For VARIAN/AMAT instruments.
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A2/A3 4-axis interface A2/A3 4-axis interface
ASK
Sales of A2/A3 4-axis interface/card/board/PCB for ion implantation (implantation/IMP) equipment. P/N: Compatible with E20000346. For VIIsta 8 inch (200mm), 12 inch (300mm). For VARIAN/AMAT instrum...
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A1 Communication Card A1 Communication Card
ASK
Sales of A1 communication card/board/PCB for ion implantation (implantation/IMP) equipment. For VIIsta 8 inch (200mm), 12 inch (300mm). For VARIAN/AMAT instruments.
DXZ Cover Plate 8 INCH
Regular price
from ¥840,000
Sale price
from ¥840,000
Regular price
Unit price
/per
For 8 inch (200 mm) cover plate for CVD equipment. Compatible with P/N: 0200-36630, 0020-36631. For AMAT Centura DXZ chambers.
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Wafer Support, Cleaner 300MM HMV Set WAFER SUPPORT, CLEANER 300MM HVM Set
Regular price
¥210,000
Sale price
¥210,000
Regular price
Unit price
/per
One set of right side (0021-14649), left side (0021-14650) and center support slot (0021-14651) of wafer/wafer support cleaner HVM for CMP machine spindle shaft. Individual sales are also possible ...
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Long Life Retainer Ring X3G, Long Life Retainer Ring X3G
ASK
A model for improving the service life and uniformity of retainer rings for CMP equipment. The material is X3G. Compatible with 8 inch (200mm) only. Compatible with AMAT Mirra, EBARA FREX/F-REX200...
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MASTERFLEX Rotary Pump Head Set of 3 Rotary Pump Head 3pc/set
Regular price
¥87,000
Sale price
¥87,000
Regular price
Unit price
/per
Head for MASTERFLEX rotary pump for CMP equipment. A part that attaches to the head of a slurry motor (tube pump). Case material: PC (polycarbonate), rotor case material: SUS (stainless steel). P/...
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Pad Conditioner Rotation Motor Gearbox Pad Cond Rotation Motor Gearbox CGI 017PLX0220-XX3959X
ASK
Pad Conditioner Rotation Motor Gearbox/Gear Box. Compatible with CGI 017PLX0220-XX3959X. For AMAT Mirra CMP equipment. Repair/overhaul is also available.
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Wafer/Brush Roller Assy
Regular price
¥1,200,000
Sale price
¥1,200,000
Regular price
Unit price
/per
Parts for brush tank for CMP cleaning equipment. Wafer/wafer/wafer brush roller assembly. Compatible parts such as genuine P/N: 0021-13858/0010-23807. For CMP cleaning equipment MESA. Repair/overha...
FURON VALVE 2PC/1SET FURON VALVE 2PC/1SET
Regular price
¥232,000
Sale price
¥232,000
Regular price
Unit price
/per
FURON (Huron) HPVM2-F44-NC 1 set of 2. Compatible with FURON NVX2-144NC (old model). For AMAT (Applied Materials) CMP equipment Mirra platen shower (pure water). Ready to use without modification.
Si focus ring for 4 inch 10pcs/lot RING FOCUS 4S 10pcs/lot
Regular price
from ¥420,000
Sale price
from ¥420,000
Regular price
Unit price
/per
Silicon (Si) focus ring for 4 inch (100mm) for etching equipment. Resistance value 1~30Ω.cm. Compatible with 1D10-350748-21. Minimum sales lot (MOQ) is 10 pieces.
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Gimbal Base, Snap-On Type, Pad Conditioner
Regular price
¥110,000
Sale price
¥110,000
Regular price
Unit price
/per
Pad conditioner diamond/diamond disc holder. Gimbal Base, Snap-On Type, Pad Conditioner. Compatible with P/N: 0040-77317. For AMAT CMP equipment Mirra.
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