Collection:
equipment parts
200 products
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A6 24 Channel In-Out A6 24 Channel In-Out AD
ASK
Sales of A6 24 Channel In-Out Card/Board/PCB for Ion Implanter/IMP Equipment. For VIIsta 8 inch (200mm), 12 inch (300mm). For VARIAN/AMAT instruments.
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A5 12 Bit, 16 Channel AD A5 12 Bit, 16 Channel AD
ASK
Sales of A5 12-bit 16-channel (channel) card/board/PCB for ion implantation (implantation/IMP) equipment. For VIIsta 8 inch (200mm), 12 inch (300mm). For VARIAN/AMAT instruments.
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A4 16 bit, 4 Channel AD A4 16 bit, 4 Channel AD
ASK
Sales of A4 16-bit 4-channel (channel) card/board/PCB for ion implantation (implantation/IMP) equipment. For VIIsta 8 inch (200mm), 12 inch (300mm). For VARIAN/AMAT instruments.
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A2/A3 4-axis interface A2/A3 4-axis interface
ASK
Sales of A2/A3 4-axis interface/card/board/PCB for ion implantation (implantation/IMP) equipment. P/N: Compatible with E20000346. For VIIsta 8 inch (200mm), 12 inch (300mm). For VARIAN/AMAT instrum...
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A1 Communication Card A1 Communication Card
ASK
Sales of A1 communication card/board/PCB for ion implantation (implantation/IMP) equipment. For VIIsta 8 inch (200mm), 12 inch (300mm). For VARIAN/AMAT instruments.
DXZ Cover Plate 8 INCH
Regular price
from ¥840,000
Sale price
from ¥840,000
Regular price
Unit price
/per
For 8 inch (200 mm) cover plate for CVD equipment. Compatible with P/N: 0200-36630, 0020-36631. For AMAT Centura DXZ chambers.
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Wafer Support, Cleaner 300MM HMV Set WAFER SUPPORT, CLEANER 300MM HVM Set
Regular price
¥210,000
Sale price
¥210,000
Regular price
Unit price
/per
One set of right side (0021-14649), left side (0021-14650) and center support slot (0021-14651) of wafer/wafer support cleaner HVM for CMP machine spindle shaft. Individual sales are also possible ...
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Long Life Retainer Ring X3G, Long Life Retainer Ring X3G
ASK
A model for improving the service life and uniformity of retainer rings for CMP equipment. The material is X3G. Compatible with 8 inch (200mm) only. Compatible with AMAT Mirra, EBARA FREX/F-REX200...
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MASTERFLEX Rotary Pump Head Set of 3 Rotary Pump Head 3pc/set
Regular price
¥87,000
Sale price
¥87,000
Regular price
Unit price
/per
Head for MASTERFLEX rotary pump for CMP equipment. A part that attaches to the head of a slurry motor (tube pump). Case material: PC (polycarbonate), rotor case material: SUS (stainless steel). P/...
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Pad Conditioner Rotation Motor Gearbox Pad Cond Rotation Motor Gearbox CGI 017PLX0220-XX3959X
Regular price
¥400,000
Sale price
¥400,000
Regular price
Unit price
/per
Pad Conditioner Rotation Motor Gearbox/Gear Box. Compatible with CGI 017PLX0220-XX3959X. For AMAT Mirra CMP equipment. Repair/overhaul is also available.
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Wafer/Brush Roller Assy
Regular price
¥1,200,000
Sale price
¥1,200,000
Regular price
Unit price
/per
Parts for brush tank for CMP cleaning equipment. Wafer/wafer/wafer brush roller assembly. Compatible parts such as genuine P/N: 0021-13858/0010-23807. For CMP cleaning equipment MESA. Repair/overha...
FURON VALVE 2PC/1SET FURON VALVE 2PC/1SET
Regular price
¥232,000
Sale price
¥232,000
Regular price
Unit price
/per
FURON (Huron) HPVM2-F44-NC 1 set of 2. Compatible with FURON NVX2-144NC (old model). For AMAT (Applied Materials) CMP equipment Mirra platen shower (pure water). Ready to use without modification.
Si focus ring for 4 inch 10pcs/lot RING FOCUS 4S 10pcs/lot
Regular price
from ¥420,000
Sale price
from ¥420,000
Regular price
Unit price
/per
Silicon (Si) focus ring for 4 inch (100mm) for etching equipment. Resistance value 1~30Ω.cm. Compatible with 1D10-350748-21. Minimum sales lot (MOQ) is 10 pieces.
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Gimbal Base, Snap-On Type, Pad Conditioner
Regular price
¥110,000
Sale price
¥110,000
Regular price
Unit price
/per
Pad conditioner diamond/diamond disc holder. Gimbal Base, Snap-On Type, Pad Conditioner. Compatible with P/N: 0040-77317. For AMAT CMP equipment Mirra.
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AI/O Board AI/O Board
Regular price
¥850,000
Sale price
¥850,000
Regular price
Unit price
/per
For AMAT (Applied Materials) CMP equipment Mirra. Analog I/O Board (AI/O Board). We will sell a new CPU board to be installed in the VME rack. Compatible with P/N: 0100-03497REV2/0100-03920/0100-20...
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MEI Board MEI Board
Regular price
¥3,300,000
Sale price
¥3,300,000
Regular price
Unit price
/per
For AMAT (Applied Materials) CMP equipment Mirra. MEI Board. A new CPU board to be installed in the VME rack is sold. P/N: Compatible with 0660-01705/0190-14502 (Please inquire for model number).
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Polymer Roller for PRF assistance
Regular price
¥7,000
Sale price
¥7,000
Regular price
Unit price
/per
A resin roller used when recycling chuck cleaning wafers (CCW). A part for pressing the Particle Removal Film (PRF) against the CCW that has been adsorbed on the vacuum table while expelling air b...
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Oxide Titan 1 3 Zone Head Assy (Excluding Retainer Ring and Membrane)
Regular price
¥1,500,000
Sale price
¥1,500,000
Regular price
Unit price
/per
Carrier head assembly for AMAT Mirra Oxide TITAN-1. For 3 zones (ports). Excludes retainer rings and membranes. Compatible with P/N: 0010-77196. 0010-77197 (Assy, Upper, 8"TITAN), 0010-77198 (Assy,...
Polishing Head Test Platform for 8 inch
Regular price
from ¥11,800,000
Sale price
from ¥11,800,000
Regular price
Unit price
/per
Test platform for leak checking polishing prior to installation on equipment. For AMAT (Applied Materials) CMP equipment Mirra. 8 inch, 3, 4 zone only.
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Improved Wafer Loss Sensor
Regular price
¥160,000
Sale price
¥160,000
Regular price
Unit price
/per
Upgrade type (substitute) compatible with OMRON wafer loss/wafer slipout sensor (with holder) E3S-BD11 (0090-77041). Prevent false slip-out detection. For AMAT (Applied Materials) CMP equipment Mirra.
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DolDol Motor + Driver DolDol Motor + Driver
Regular price
¥4,000,000
Sale price
¥4,000,000
Regular price
Unit price
/per
A motor + driver set that can replace (compatible) the NSK Megatorque Motor (RZ0810FN507/0190-14344) + Driver (EP0810AF3/AF5/AF8-05) which has been discontinued. For AMAT CMP equipment Mirra.
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Pad Conditioner DDF3 Head Conversion Kit Pad Conditioner DDF3 Head Conversion Kit
Regular price
¥220,000
Sale price
¥220,000
Regular price
Unit price
/per
Modification kit for pad conditioner DDF3 (DDF-3) head. Diaphragm/diaphragmless design reduces leakage issues. cylinder type. Includes assembly instructions. For AMAT CMP equipment Mirra. P/N: BW41...
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Robot Motor Shoulder-Axis
Regular price
¥190,000
Sale price
¥190,000
Regular price
Unit price
/per
Replacement for the discontinued Wet Robot Shoulder Axis Motor (Shoulder Axis Motor P/N: 0190-77125). Our P/N: BW402L3R3. with encoder. 8" High Flex Cable specification. For AMAT CMP equipment M...
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Robot Motor Wrist-Axis
Regular price
¥190,000
Sale price
¥190,000
Regular price
Unit price
/per
Replacement for the discontinued Wet Robot Wrist Axis Motor (Wrist Axis Motor P/N: 0190-16236). Our P/N: BW402L2R3. with encoder. 4.5" High Flex Cable specification. For AMAT CMP equipment Mirra.
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