Collection:
equipment parts
200 products
Sold Out
A1 Communication Card A1 Communication Card
ASK
Sales of A1 communication card/board/PCB for ion implantation (implantation/IMP) equipment. For VIIsta 8 inch (200mm), 12 inch (300mm). For VARIAN/AMAT instruments.
Flex 45 12 Inch ESC Refurbishment Flex 45 12 INCH ESC Refurbishment
Regular price
¥3,600,000
Sale price
¥3,600,000
Regular price
Unit price
/per
Electrostatic chuck (ESC/E chuck) for etching equipment. For 12 inches (300mm). Compatible with P/N: 839-800327-390. For LAM/Flex 45.
* The photo is an image of the ESC and is different from the ...
Sold Out
ASSY ESC RF 200mm Flat high flow Assy ESC, RF, Flat DZ Hi flow, outer/AP
Regular price
¥4,200,000
Sale price
¥4,200,000
Regular price
Unit price
/per
Electrostatic chuck (ESC/E chuck) for etching equipment. For 8 inch (200mm). Compatible with P/N: 0010-07946. For AMAT Centura E-MAX(EMAX).
* The photo is an image of the ESC and is different fr...
DXZ Cover Plate 8 INCH
Regular price
from ¥840,000
Sale price
from ¥840,000
Regular price
Unit price
/per
For 8 inch (200 mm) cover plate for CVD equipment. Compatible with P/N: 0200-36630, 0020-36631. For AMAT Centura DXZ chambers.
Sold Out
Wafer Support, Cleaner 300MM HMV Set WAFER SUPPORT, CLEANER 300MM HVM Set
Regular price
¥210,000
Sale price
¥210,000
Regular price
Unit price
/per
One set of right side (0021-14649), left side (0021-14650) and center support slot (0021-14651) of wafer/wafer support cleaner HVM for CMP machine spindle shaft. Individual sales are also possible ...
Sold Out
Long Life Retainer Ring X3G, Long Life Retainer Ring X3G
ASK
A model for improving the service life and uniformity of retainer rings for CMP equipment. The material is X3G. Compatible with 8 inch (200mm) only. Compatible with AMAT Mirra, EBARA FREX/F-REX200...
Sold Out
MASTERFLEX Rotary Pump Head Set of 3 Rotary Pump Head 3pc/set
Regular price
¥87,000
Sale price
¥87,000
Regular price
Unit price
/per
Head for MASTERFLEX rotary pump for CMP equipment. A part that attaches to the head of a slurry motor (tube pump). Case material: PC (polycarbonate), rotor case material: SUS (stainless steel). P/...
Sold Out
Pad Conditioner Rotation Motor Gearbox Pad Cond Rotation Motor Gearbox CGI 017PLX0220-XX3959X
Regular price
¥400,000
Sale price
¥400,000
Regular price
Unit price
/per
Pad Conditioner Rotation Motor Gearbox/Gear Box. Compatible with CGI 017PLX0220-XX3959X. For AMAT Mirra CMP equipment. Repair/overhaul is also available.
Sold Out
Wafer/Brush Roller Assy
Regular price
¥1,200,000
Sale price
¥1,200,000
Regular price
Unit price
/per
Parts for brush tank for CMP cleaning equipment. Wafer/wafer/wafer brush roller assembly. Compatible parts such as genuine P/N: 0021-13858/0010-23807. For CMP cleaning equipment MESA. Repair/overha...
FURON VALVE 2PC/1SET FURON VALVE 2PC/1SET
Regular price
¥232,000
Sale price
¥232,000
Regular price
Unit price
/per
FURON (Huron) HPVM2-F44-NC 1 set of 2. Compatible with FURON NVX2-144NC (old model). For AMAT (Applied Materials) CMP equipment Mirra platen shower (pure water). Ready to use without modification.
Si focus ring for 4 inch 10pcs/lot RING FOCUS 4S 10pcs/lot
Regular price
from ¥420,000
Sale price
from ¥420,000
Regular price
Unit price
/per
Silicon (Si) focus ring for 4 inch (100mm) for etching equipment. Resistance value 1~30Ω.cm. Compatible with 1D10-350748-21. Minimum sales lot (MOQ) is 10 pieces.
Sold Out
Gimbal Base, Snap-On Type, Pad Conditioner
Regular price
¥110,000
Sale price
¥110,000
Regular price
Unit price
/per
Pad conditioner diamond/diamond disc holder. Gimbal Base, Snap-On Type, Pad Conditioner. Compatible with P/N: 0040-77317. For AMAT CMP equipment Mirra.
Sold Out
AI/O Board AI/O Board
Regular price
¥850,000
Sale price
¥850,000
Regular price
Unit price
/per
For AMAT (Applied Materials) CMP equipment Mirra. Analog I/O Board (AI/O Board). We will sell a new CPU board to be installed in the VME rack. Compatible with P/N: 0100-03497REV2/0100-03920/0100-20...
Sold Out
MEI Board MEI Board
Regular price
¥3,300,000
Sale price
¥3,300,000
Regular price
Unit price
/per
For AMAT (Applied Materials) CMP equipment Mirra. MEI Board. A new CPU board to be installed in the VME rack is sold. P/N: Compatible with 0660-01705/0190-14502 (Please inquire for model number).
Sold Out
Polymer Roller for PRF assistance
Regular price
¥7,000
Sale price
¥7,000
Regular price
Unit price
/per
A resin roller used when recycling chuck cleaning wafers (CCW). A part for pressing the Particle Removal Film (PRF) against the CCW that has been adsorbed on the vacuum table while expelling air b...
Sold Out
Oxide Titan 1 3 Zone Head Assy (Excluding Retainer Ring and Membrane)
Regular price
¥1,500,000
Sale price
¥1,500,000
Regular price
Unit price
/per
Carrier head assembly for AMAT Mirra Oxide TITAN-1. For 3 zones (ports). Excludes retainer rings and membranes. Compatible with P/N: 0010-77196. 0010-77197 (Assy, Upper, 8"TITAN), 0010-77198 (Assy,...
Polishing Head Test Platform for 8 inch
Regular price
from ¥11,800,000
Sale price
from ¥11,800,000
Regular price
Unit price
/per
Test platform for leak checking polishing prior to installation on equipment. For AMAT (Applied Materials) CMP equipment Mirra. 8 inch, 3, 4 zone only.
Sold Out
Improved Wafer Loss Sensor
Regular price
¥160,000
Sale price
¥160,000
Regular price
Unit price
/per
Upgrade type (substitute) compatible with OMRON wafer loss/wafer slipout sensor (with holder) E3S-BD11 (0090-77041). Prevent false slip-out detection. For AMAT (Applied Materials) CMP equipment Mirra.
Sold Out
DolDol Motor + Driver DolDol Motor + Driver
Regular price
¥4,000,000
Sale price
¥4,000,000
Regular price
Unit price
/per
A motor + driver set that can replace (compatible) the NSK Megatorque Motor (RZ0810FN507/0190-14344) + Driver (EP0810AF3/AF5/AF8-05) which has been discontinued. For AMAT CMP equipment Mirra.
Sold Out
Pad Conditioner DDF3 Head Conversion Kit Pad Conditioner DDF3 Head Conversion Kit
Regular price
¥220,000
Sale price
¥220,000
Regular price
Unit price
/per
Modification kit for pad conditioner DDF3 (DDF-3) head. Diaphragm/diaphragmless design reduces leakage issues. cylinder type. Includes assembly instructions. For AMAT CMP equipment Mirra. P/N: BW41...
Sold Out
Robot Motor Shoulder-Axis
Regular price
¥170,000
Sale price
¥170,000
Regular price
Unit price
/per
Replacement for the discontinued Wet Robot Shoulder Axis Motor (Shoulder Axis Motor P/N: 0190-77125). Our P/N: BW402L3R3. with encoder. 8" High Flex Cable specification. For AMAT CMP equipment M...
Sold Out
Robot Motor Wrist-Axis
Regular price
¥170,000
Sale price
¥170,000
Regular price
Unit price
/per
Replacement for the discontinued Wet Robot Wrist Axis Motor (Wrist Axis Motor P/N: 0190-16236). Our P/N: BW402L2R3. with encoder. 4.5" High Flex Cable specification. For AMAT CMP equipment Mirra.
...
Robot Motor Z-Axis
Regular price
¥170,000
Sale price
¥170,000
Regular price
Unit price
/per
Wet Robot Z Axis Motor (Discontinued/Discontinued). P/N: 0190-17944 (our company's P/N: BW402L1L4) 13" High Flex Cable specification, P/N: 0190-16234 (our company's BW402L1R5) 15 pin specificati...
220-540nm Probes for Model 308 UV Light Meter
Regular price
from ¥220,000
Sale price
from ¥220,000
Regular price
Unit price
/per
Dedicated probe for UV illuminance meter (Power Meter) Model 308 (365nm, 400nm, 420nm, 436nm, etc.). The successor model of the old model 306 manufactured by OAI. Calibration service is also availa...
Use left/right arrows to navigate the slideshow or swipe left/right if using a mobile device