Sales of spindle assemblies for CMP equipment. Standard repair or repair service by special parts replacement is also available. Compatible with P/N: 0010-77216. For AMAT Mirra. For 8 inch/200mm.
Sales of wet robot Assy for CMP equipment. Standard repair or repair service by special parts replacement is also available. P/N: 0010-77676, 0010-77400 etc.
Sales of cross pedestal (harmonic drive) Assy for CMP equipment. Standard repair or repair service including replacement of new harmonic gear is also available. P/N: 0010-26153 (Old: 0010-77141). F...
Sales of power supplies/cards/boards/PCB for ion implantation (implantation/IMP) equipment. P/N: Compatible with E21000124. For VIIsta 8 inch (200mm), 12 inch (300mm). For VARIAN/AMAT instruments.
Sales of A5 12-bit 16-channel (channel) card/board/PCB for ion implantation (implantation/IMP) equipment. For VIIsta 8 inch (200mm), 12 inch (300mm). For VARIAN/AMAT instruments.
Sales of A4 16-bit 4-channel (channel) card/board/PCB for ion implantation (implantation/IMP) equipment. For VIIsta 8 inch (200mm), 12 inch (300mm). For VARIAN/AMAT instruments.
Sales of A2/A3 4-axis interface/card/board/PCB for ion implantation (implantation/IMP) equipment. P/N: Compatible with E20000346. For VIIsta 8 inch (200mm), 12 inch (300mm). For VARIAN/AMAT instrum...
Sales of A1 communication card/board/PCB for ion implantation (implantation/IMP) equipment. For VIIsta 8 inch (200mm), 12 inch (300mm). For VARIAN/AMAT instruments.
One set of right side (0021-14649), left side (0021-14650) and center support slot (0021-14651) of wafer/wafer support cleaner HVM for CMP machine spindle shaft. Individual sales are also possible ...
A model for improving the service life and uniformity of retainer rings for CMP equipment. The material is X3G. Compatible with 8 inch (200mm) only. Compatible with AMAT Mirra, EBARA FREX/F-REX200...
Head for MASTERFLEX rotary pump for CMP equipment. A part that attaches to the head of a slurry motor (tube pump). Case material: PC (polycarbonate), rotor case material: SUS (stainless steel). P/...
Pad Conditioner Rotation Motor Gearbox/Gear Box. Compatible with CGI 017PLX0220-XX3959X. For AMAT Mirra CMP equipment. Repair/overhaul is also available.
Parts for brush tank for CMP cleaning equipment. Wafer/wafer/wafer brush roller assembly. Compatible parts such as genuine P/N: 0021-13858/0010-23807. For CMP cleaning equipment MESA. Repair/overha...
FURON (Huron) HPVM2-F44-NC 1 set of 2. Compatible with FURON NVX2-144NC (old model). For AMAT (Applied Materials) CMP equipment Mirra platen shower (pure water). Ready to use without modification.
Silicon (Si) focus ring for 4 inch (100mm) for etching equipment. Resistance value 1~30Ω.cm. Compatible with 1D10-350748-21. Minimum sales lot (MOQ) is 10 pieces.
Pad conditioner diamond/diamond disc holder. Gimbal Base, Snap-On Type, Pad Conditioner. Compatible with P/N: 0040-77317. For AMAT CMP equipment Mirra.
For AMAT (Applied Materials) CMP equipment Mirra. Analog I/O Board (AI/O Board). We will sell a new CPU board to be installed in the VME rack. Compatible with P/N: 0100-03497REV2/0100-03920/0100-20...
For AMAT (Applied Materials) CMP equipment Mirra. MEI Board. A new CPU board to be installed in the VME rack is sold. P/N: Compatible with 0660-01705/0190-14502 (Please inquire for model number).
A resin roller used when recycling chuck cleaning wafers (CCW). A part for pressing the Particle Removal Film (PRF) against the CCW that has been adsorbed on the vacuum table while expelling air b...
Carrier head assembly for AMAT Mirra Oxide TITAN-1. For 3 zones (ports). Excludes retainer rings and membranes. Compatible with P/N: 0010-77196. 0010-77197 (Assy, Upper, 8"TITAN), 0010-77198 (Assy,...
Test platform for leak checking polishing prior to installation on equipment. For AMAT (Applied Materials) CMP equipment Mirra. 8 inch, 3, 4 zone only.
