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equipment parts

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Megasonic Tank Base Assy Megasonic Tank Base
ASK
Sales of megasonic tank base for cleaning equipment. For AMAT Mesa. For 8"/200mm and 12"/300mm.
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Megasonic Halar Tank Megasonic Halar Tank
ASK
Sales of megasonic Halar tanks for cleaning equipment. For AMAT Mesa. For 8"/200mm and 12"/300mm.
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SRD Lamp Assy with Bulb SRD Lamp Assy with Bulb
ASK
Sales of SRD lamp Assy (with bulb) for cleaning equipment. For AMAT Mesa. For 8"/200mm and 12"/300mm.
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Slurry Arm Assy
ASK
Sales of slurry arms for CMP equipment. Multiple types of lineup for AMAT Mirra and Reflexion. For 8"/200mm and 12"/300mm.
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Rorze Smif Indexer
ASK
Sales of Smif indexers for CMP equipment. The robot is Rorze. Standard repair or repair service by special parts replacement is also available. P/N: Compatible with RE201-822-005. For AMAT Mirra. F...
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Momentum 776 MP Cylinder Assy Momentum 776 MP Cylinder
ASK
Sales of MP cylinder Assy for CMP equipment. Standard repair or repair service by special parts replacement is also available. Compatible with P/N: 0750-111515. For IPEC776. For 8 inch/200mm.
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Titan Head Clamp Titan Head Clamp
ASK
Sales of Titan head clamps for CMP equipment. For AMAT Mirra. For 8 inch/200mm.
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Pad Cond Assy with Motors Pad Cond Assy with Motors
ASK
Sale of pad conditioner Assy (with motor) for CMP equipment. Standard repair or repair service by special parts replacement is also available. Compatible with P/N: 0010-12344. For AMAT Mirra. For 8...
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Platen Motor Pulley and Bushing Assy Platen Motor Pulley and Bushing Platen Motor Pulley and Bushing Assy Platen Motor Pulley and Bushing
ASK
Sales of platen motor pulley bushing assemblies for CMP equipment. Standard repair or repair service by special parts replacement is also available. For AMAT Mirra. For 8 inch/200mm.
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Lower Platen Assy And Upper Platen Lower Platen Assy And Upper Platen
ASK
Sales of platen (lower/upper) assemblies for CMP equipment. Standard repair or repair service by special parts replacement is also available. Compatible with P/N: 0010-77293. For AMAT Mirra. For 8 ...
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6inch HCLU PAD Plate and Pedestal Film
ASK
Sales of parts for HCLU load cups for CMP equipment. pad plate, pedestal film. For AMAT Mirra. For 8 inch/200mm.
HCLU Load Cup Assy HCLU Load Cup Assy
from ¥6,000,000
from ¥6,000,000
Sales of HCLU load cups for CMP equipment. Standard repair or repair service by special parts replacement is also available. Compatible with P/N: 0240-12272. For AMAT Mirra. For 8 inch/200mm.
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Head Sweep Motor Assy Head Sweep Motor
ASK
Sales of head sweep motor assemblies for CMP equipment. Standard repair or repair service by special parts replacement is also available. Compatible with P/N: 0010-03697. For AMAT Mirra. For 8 inch...
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3-Port Rotary Union
ASK
Sales of 3-port (zone) rotary unions for CMP equipment polishing heads. Mainly compatible products for Dublin products. Standard repair or repair service by special parts replacement is also availa...
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Spindle Assy Spindle
ASK
Sales of spindle assemblies for CMP equipment. Standard repair or repair service by special parts replacement is also available. Compatible with P/N: 0010-77216. For AMAT Mirra. For 8 inch/200mm.
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Wet Robot Assy Wet Robot Wet Robot Assy Wet Robot
¥5,250,000
¥5,250,000
Sales of wet robot Assy for CMP equipment. Standard repair or repair service by special parts replacement is also available. P/N: 0010-77676, 0010-77400 etc.
Cross Pedestal (Harmonic Drive)
ASK
Sales of cross pedestal (harmonic drive) Assy for CMP equipment. Standard repair or repair service including replacement of new harmonic gear is also available. P/N: 0010-26153 (Old: 0010-77141). F...
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Power Supply (Board, Card) Power Supply (Board, Card)
ASK
Sales of power supplies/cards/boards/PCB for ion implantation (implantation/IMP) equipment. P/N: Compatible with E21000124. For VIIsta 8 inch (200mm), 12 inch (300mm). For VARIAN/AMAT instruments.
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A6 24 Channel In-Out A6 24 Channel In-Out AD A6 24 Channel In-Out A6 24 Channel In-Out AD
ASK
Sales of A6 24 Channel In-Out Card/Board/PCB for Ion Implanter/IMP Equipment. For VIIsta 8 inch (200mm), 12 inch (300mm). For VARIAN/AMAT instruments.
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A5 12 Bit, 16 Channel AD A5 12 Bit, 16 Channel AD A5 12 Bit, 16 Channel AD A5 12 Bit, 16 Channel AD
ASK
Sales of A5 12-bit 16-channel (channel) card/board/PCB for ion implantation (implantation/IMP) equipment. For VIIsta 8 inch (200mm), 12 inch (300mm). For VARIAN/AMAT instruments.
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A4 16 bit, 4 Channel AD A4 16 bit, 4 Channel AD A4 16 bit, 4 Channel AD A4 16 bit, 4 Channel AD
ASK
Sales of A4 16-bit 4-channel (channel) card/board/PCB for ion implantation (implantation/IMP) equipment. For VIIsta 8 inch (200mm), 12 inch (300mm). For VARIAN/AMAT instruments.
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A2/A3 4-axis interface A2/A3 4-axis interface
ASK
Sales of A2/A3 4-axis interface/card/board/PCB for ion implantation (implantation/IMP) equipment. P/N: Compatible with E20000346. For VIIsta 8 inch (200mm), 12 inch (300mm). For VARIAN/AMAT instrum...
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A1 Communication Card A1 Communication Card A1 Communication Card A1 Communication Card
ASK
Sales of A1 communication card/board/PCB for ion implantation (implantation/IMP) equipment. For VIIsta 8 inch (200mm), 12 inch (300mm). For VARIAN/AMAT instruments.
Flex 45 12 Inch ESC Refurbishment Flex 45 12 INCH ESC Refurbishment
¥3,600,000
¥3,600,000
Electrostatic chuck (ESC/E chuck) for etching equipment. For 12 inches (300mm). Compatible with P/N: 839-800327-390. For LAM/Flex 45. * The photo is an image of the ESC and is different from the ...