POLOS μプリンター POLOS μPrinter

マスクレス露光(フォトリソグラフィー)を可能にするPOLOSマイクロプリンター。マイクロ構造、複製、スティッチングが可能なソフトフェアを搭載。研究開発(R&D)向け。

POLOS µPrinter Maskless photolithography equipment
SFTprint
Machine control software allowing for
- microstructures fabrication, replication and stitching
- control of the fabrication process and alignment procedures
User interface
23" all-in-one computer
- full HD (1920x1080) screen
- 4GB RAM DDR3 and Intel Core i3 CPU
- 1To HDD
- 2 USB2 ports + 2 USB3 ports + 1 HDMI port - Microsoft Windows 10 Family 64bit
keyboard (QWERTY) and mouse
Warranty
1 year warranty on all parts and software
10X objective
with magnetic "quick-release" system
field-of-view = 1.35 mm x 0.75 mm; resolution < 2 μm
Motorized Z stage
18 mm travel range with 0.3 μm precision
Motorized XY stage
75 x 75 mm travel range with 0.15 μm precision and 2 μm repeatability Dedicated to stitching, step-and-repeat, automatic dose tests and alignment
Manual rotation stage
360° rotation with 0.1° precision
Holder for 4'' circular wafers