Platen Motor Servo Pack (Driver) Repair

Repair of platen motor servo pack (driver) for CMP equipment. The servo back is Yaskawa P/N: SGDB-44ADG. Yaskawa P/N: 1080-01170 or SGMS-50A6AB can be repaired for the platen motor. Possibility of gearbox repair. For AMAT Mirra. For 8 inch/200mm.

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