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Regeneration of electrostatic chucks (ESC/E chucks) for ion implantation (implantation/IMP) equipment. Reproduction with upgrades that extend durability and lifespan than genuine products. Compatible with ESCs for Varian VIISta, VIISion, E220/E500/EHP220/EHP500, AMAT Quantum. Playback content can be selected according to the damage situation. E11098654/E11098653/E11144761.
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