Electrostatic Chuck (ESC/E Chuck) Refurbishment Echuck/E-Chuck Refurbishment

Regeneration of electrostatic chucks (ESC/E chucks) for etching equipment. Compatible with Centura DPS, Super-e, MXP+, TCP/Alliance 9400/9600, Exelan-Hpt, Flex, Kiyo, UNITY, 8500, DRM, SCCM, etc. Playback content can be selected according to the damage situation. Mainly for LAM, TEL, AMAT 8, 12 inch (200, 300mm).