Chuck Cleaning Wafer 5 inch

Cleaning wafer to remove dirt/dust/particles on vacuum/vacuum/electrostatic/mechanical/pin chuck. Effective in reducing dummy wafer/wafer/wafer/wafer/wafer/wafer loss, reducing equipment downtime, and improving helium (He) leak/exposure failure. Lineup for 4, 5, 6, 8 and 12 inches.

RNC-15B-0021F(CCW-7021-01-150-FL), RNC-15B-0021FG4(CCW-7021-01-150CS), RNC-15B-0021FG4(CCW-7021-01-150-FL-CS)

For more information is here

*For 5-inch CCW, it is assumed that you will supply Si wafers, including spares.