Vacuum Pump for polymer vacuum plate for CCW recycle

Vacuum pump manufactured by Nitto Kohki. P/N: VP0940. Dedicated pump for vacuum table used when regenerating chuck cleaning wafer (CCW). Ultimate vacuum pressure: -53.3kPa, Discharge air volume: 60L/min. Accessories: φ6 air tube (2m), air ON/OFF hand valve, with silencer.

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