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Repair of platen motors and gearboxes for CMP equipment. Yaskawa P/N: 1080-01170 or SGMS-50A6AB for platen motor, Alpha P/N: 3970-01013 or 140-MFI-10-141-000 for gearbox, Stober, Compatible with Yaskawa. For AMAT Mirra. For 8 inch/200mm. The gearbox can be replaced with a new original SIMPO product.
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