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MKS UPAコントローラー(4ポート用)修理 MKS UPA Controller 4-port
ASK
CMP装置用MKS製UPAコントローラー(4ポートタイプ)の修理。MKS製。修理後のロボットは専用のテスト機での動作確認を実施。P/N:0190-15840/0190-24854/0190-24857/0190-25647/0190-25733/0190-38324/0190-11803等に対応。
【修理内容】
1. 分解前のコントローラーのテスト
2. 圧力・真空流量の校正
3. コ...
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MKS UPA修理 MKS UPA Repair
ASK
CMP装置用MKS製UPAの修理。MKS製。修理後のコントローラーは専用のテスト機での動作確認を実施。P/N:0190-15378Rに対応。
※クリアベースとコントロールボードの修理は含まれません。
-ベースにクラックがある場合は修理不可
-コントロールボードのメインCPUに結果がある場合は修理不可
リードタイム:受注後約5~6週間
保証:納入後3ケ月
※写真は代表的なものを載せて...
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Model 200 Manual Single Sided Tabletop Mask Aligner for R&D
ASK
Single-sided mask aligner (adhesion/proximity/contact exposure) equipment. It is compact and easy to install because it is a desk/tabletop type. Manual type. For research and development (R&D)...
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Model 2000 edge bead exposure system for mass production
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Single-sided mask aligner (adhesion/proximity/contact exposure) system. optical. Fully automatic/fully automatic. For medium volume production. Flood exposure/edge bead exposure is possible. For e...
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Model 212 Manual single-sided tabletop large-area mask aligner for R&D
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Single-sided mask aligner (adhesion/proximity/contact exposure) system. Benchtop type, compact and easy to install. Manual type. For research and development (R&D). reasonable. For medium-sized...
Model 308/308T UV Illumination Meter Model 308/308T Light Meter
Regular price
from ¥320,000
Sale price
from ¥320,000
Regular price
Unit price
/per
Handy type UV illumination meter (Power Meter). The successor model of the old model 306 manufactured by OAI. Calibration service is also available. We also sell dedicated probes (365nm, 400nm, 420...
220-540nm Probes for Model 308 UV Light Meter
Regular price
from ¥220,000
Sale price
from ¥220,000
Regular price
Unit price
/per
Dedicated probe for UV illuminance meter (Power Meter) Model 308 (365nm, 400nm, 420nm, 436nm, etc.). The successor model of the old model 306 manufactured by OAI. Calibration service is also availa...
Model 308照度計用専用プローブ 220-540nm Probes for Model 308 UV Light Meter
Regular price
from ¥200,000
Sale price
from ¥200,000
Regular price
Unit price
/per
UV照度計(パワーメーター/Power Meter)モデル308用専用プローブ(365nm、400nm、420nm、436nm等)。OAI社製で旧型モデル306の後継機種。校正サービスも提供可。フォトリソグラフィー(露光)装置向け。
※w/Handle、および、高温仕様(High Temp)用のプローブは別価格となります。
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Model 32 UV LED light source
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UV LED light source (Light source). Collimated light source for photolithography/exposure/photolithography applications. Made by OAI. For semiconductors, MEMS, research and development (R&D), ...
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Model 6000 Fully Automated Mass Production Mask Aligner for Mass Production
ASK
Single-sided mask aligner (adhesion/proximity/contact exposure) equipment. Optical back exposure type. Fully automatic/fully automatic. For semiconductors, MEMS, research and development (R&D)....
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