POLOS μライター POLOS μWriter

光学露光(フォトリソグラフィー)を可能にするPOLOSマイクロライター。コンフォーカル顕微鏡付き。マイクロレーザー制御ソフトウェアを搭載。主に405nmレーザー用。研究開発(R&D)向け。

405nm laser, optical system including 3 lenses, confocal microscope with yellow illumination for focusing and basic aligning and inspection. 120mm/s writing speed. Maximum writing area 100x92mm^2. Substrate tilt levelling and full bed curvature calibration.
Including computer with pattern processing and microlaser control software. It can combine multiple patterns and make basic editing operations such as pattern inversion, rotations, framing and offset adjustments. Supported formats GDSII and PNG.