ヘッドスウィープモーターAssy修理 Head Sweep Motor Repair

CMP装置用ヘッドスウィープモーターAssyの修理。純正品に見られるケーブル切れの問題を改善したアップグレード付修理。P/N:0010-77217、0010-03697。AMAT Mirra 8インチ(200mm)用。

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【修理内容】

• Headsweep is fully inspected upon receipt
• A2 and A3 assemblies are modified to Balanceworx keyed design
• Bearings replaced and/or repacked
• Ball nut and lead screws replaced or cleaned & re-greased
• Lead screw is replaced as required
• OEM clamps are split and utilized with two screws for clamping to ensure uniform pressure
• Cable harness replaced
• Motor/cable can be ‘clocked’ 90° to prevent cable stress
• Lead screw TIR is verified to be less than .003″
• All assemblies bench tested and cycled (forward & reverse motion)
• Includes C of C printed on cleanroom paper