CMP装置用HCLUロードカップの修理/再生/オーバーホール。洗浄、コート剥離、センターシャフト他主要パーツ交換込みのフルOH。ブラックスティックコーティングはスラリー固着の防止効果あり。P/N:0240-31390、0010-77157。AMAT Mirra 8インチ(200mm)用。オプションでセンタリングジョー(P/N:0020-78932)、デルリンフォーク交換も実施。
詳しくはこちらから
HCLU 200MM REFURBISHMENT, REQUIRES CORE FROM CUSTOMER
SERVICE INCLUDES:
COMPLETE UNIT DISASSEMBLY AND CLEANING -- ALL COMPONENTS
REPLACEMENT OF ALL HARDWARE
LINEAR BEARING CLEANED & REGREASED
UNIT LEAK TEST -- INTERNAL 24 HOURS & EXTERNAL 24 HOURS AIR CYLINDER OPERATIONAL TEST
SENSOR FUNCTIONALITY TEST – 4000 CYCLE TEST
PACKAGES WITH CUSTOM FOAM INSERT INCLUDES C OF C ON CLEANROOM PAPER
REPLACED ON REBUILD:
NEW COATING OF HCLU MAIN COMPONENTS
CENTERING JAW BEARINGS (18)
CENTERING JAW AIR CYLINDERS (3)
CENTERING JAW SEALS (3)
PEDESTAL UP AIR CYLINDERS (3)
CUP UP AIR CYLINDER (1)
ALIGNMENT COUPLERS (3)
CUP ALIGNMENT COUPLER (1)
PEDESTAL SHAFT BUSHINGS (2)
PEDESTAL SHAFT SEALS (2)
PEDESTAL SHAFT
BELLOWS
CUP COVER
TUBING (ALL)
SENSORS ARRAY
ALL O-RINGS (18)
ALL HARDWARE
DOES NOT INCLUDE NEW PPS CENTERING JAWS OR FORKS – MAJOR DAMAGED NON-CONSUMABLE PARTS WILL BE QUOTED SEPERATELY
